Investigation of Non-equilibrium near Vacuum Arc Cathode Spot to Retrograde Motion Affected by Changes in Atmospheric Pressure

Currently, automation is required to replace manual work because of the problems of an aging society and a declining birth rate. The oxide layer removal method using the vacuum arc has been proposed as one of surface treatment techniques. Waste material can be minimized and high-speed removal is possible. However, the surface area that can be treated under vacuum is limited. Surface treatment technology using vacuum arcs is not suitable for automation. Therefore, establish an oxide film treatment technique using a vacuum arc in a low vacuum. In this research, the contribution of non-equilibrium near the vacuum arc cathode spot to the retrograde motion affected by changes in atmospheric pressure is investigated. Specifically, multi-point spectroscopic measurements were made using a spectrometer and a high-speed video camera. The measurements focused on copper atoms generated from the cathode spot at the copper cathode. The temperature was calculated using the Boltzmann plot method.