Magnetically-Enhanced Plasmas: Magnetron

FOCUS · HW4 · ID: 1531236





Presentations

  • ORAL

    Publication: 1. Köhn K., Krüger D., Kemaneci E., Xu L., Eremin D., Brinkmann R.P., Plasma Sources Sci. Technol. 30, 105014 (2021)
    2. Köhn K., Krüger D., Xu L., Eremin D., Brinkmann R.P., Plasma Sources Sci. Technol. 32, 055012 (2021)

    Presenters

    • Ralf Peter Brinkmann

      • Ruhr Univ Bochum

    Authors

    • Ralf Peter Brinkmann

      • Ruhr Univ Bochum
    • Kevin Koehn

      • Ruhr Univ Bochum
      • Ruhr University Bochum
    • Dennis Krueger

      • Ruhr Univ Bochum
      • Ruhr University Bochum
    • Liang Xu

      • Soochow University
    • Denis Eremin

      • Ruhr Univ Bochum
      • Ruhr University Bochum

    View abstract →

  • ORAL

    Presenters

    • Kevin Koehn

      • Ruhr Univ Bochum
      • Ruhr University Bochum

    Authors

    • Kevin Koehn

      • Ruhr Univ Bochum
      • Ruhr University Bochum
    • Lukas Vogelhuber

      • Ruhr University Bochum
    • Denis Eremin

      • Ruhr Univ Bochum
      • Ruhr University Bochum
    • Dennis Krueger

      • Ruhr Univ Bochum
      • Ruhr University Bochum
    • Liang Xu

      • Soochow University
    • Ralf Peter Brinkmann

      • Ruhr Univ Bochum

    View abstract →

  • ORAL · Invited

    Publication: [1] L. Xu, D. Eremin, and R. P. Brinkmann, Plasma Sources Science and Technology 30, 075013 (2021).
    [2] L. Xu, D. Eremin, A. Smolyakov, D. Krüger, K. Köhn, and R. P. Brinkmann, arXiv: 2202.07033 (2022).
    [2] L. Xu, H. M. Sun, D. Eremin, S. Ganta, I. Kaganovich, K. Bera, and S. Rauf, arXiv:2305.15941 (2023).

    Presenters

    • Liang Xu

      • Soochow University, China

    Authors

    • Liang Xu

      • Soochow University, China
    • Denis Eremin

      • Ruhr Univ Bochum
      • Ruhr University Bochum
    • Andrei Smolyakov

      • Univ Saskatchewan
    • Haoming Sun

      • École Polytechnique fédérale de Lausanne (EPFL), Swiss Plasma Center (SPC), Switzerland
    • Dennis Krueger

      • Ruhr Univ Bochum
      • Ruhr University Bochum
    • Kevin Koehn

      • Ruhr Univ Bochum
      • Ruhr University Bochum
    • Ralf Peter Brinkmann

      • Ruhr Univ Bochum
    • Sathya S Ganta

      • Applied Materials, Inc.
      • Applied Materials Inc
      • Applied Materials
    • Igor D Kaganovich

      • Princeton Plasma Physics Laboratory
    • Kallol Bera

      • Applied Materials, Inc.
      • Applied Materials
    • Shahid Rauf

      • Applied Materials, Inc.
      • Applied Materials

    View abstract →