Magnetrons and Multipactors

INVITED · HT1 · ID: 1531182

Presentations

  • ORAL · Invited

    –

    Publication: 1. Y.Ohtsu, K. Yasuda and J. Schulze, "Temporal evolution of the ion flux to the target in rotational RF multi-magnetron plasma", J. Vac. Sci. Technol. A, 40, 5, 053006(9pp)
    2. K. Yasuda, Y.Ohtsu and J.Schulze, "Development of a cruciform radio-frequency closed magnetron sputtering source including four sectorial magnetron sputtering discharges for uniform target utilization", Vacuum 202(2022)111184(7pp)
    3. Md. A. Hossain, Md. A. M. Patwary, Md. M. Rahman and Y. Ohtsu, "Properties of AZO thin films prepared by stationary and rotating RF magnetized plasma sputtering source", AIP Advances, 12, (2022), 015224-1-9
    4. Y. Ohtsu, R. Tanaka and T. Nakashima, "Development of rotational maze-shaped RF magnetron plasma for successful target utilization and the thin film preparation", Jpn.J。Appl. Phys., Special Issue: Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials, 60, SA(2021), SAAB01-1-7
    5. Y. Ohtsu, T. Nakashima, R. Tanaka and J. Schulze," Characteristics of a rotational windmill-shaped radio frequency magnetron sputtering plasma for effective target utilization", Vacuum, 181,(2020) 109593-1-10

    Presenters

    • Yasunori Otsu

      • Saga University, Japan

    Authors

    • Yasunori Otsu

      • Saga University, Japan

    • Md. Amzad Hossain

      • Jashore University of Science and Technology

    • Julian Schulze

      • Bochum University
      • Ruhr University Bochum, Germany
      • Ruhr-University Bochum

    View abstract →

  • ORAL · Invited

    –

    Presenters

    • Sathya S Ganta

      • Applied Materials, Inc.
      • Applied Materials Inc
      • Applied Materials

    Authors

    • Sathya S Ganta

      • Applied Materials, Inc.
      • Applied Materials Inc
      • Applied Materials

    • Kallol Bera

      • Applied Materials, Inc.
      • Applied Materials

    • Shahid Rauf

      • Applied Materials, Inc.
      • Applied Materials

    • Igor D Kaganovich

      • Princeton Plasma Physics Laboratory

    • Alexander V Khrabrov

      • Princeton Plasma Physics Laboratory

    • Andrew Tasman T Powis

      • Princeton Plasma Physics Laboratory

    • Dmytro Sydorenko

      • University of Alberta
      • University of Alberta, Edmonton, Alberta T6G 2E1, Canada

    • Liang Xu

      • Soochow University, China

    View abstract →