Opportunities for Plasma Science and Engineering in Microelectronics Fabrication

Presentations

• Introduction

  ORAL

  Oct. 9, 2023, 10:00 AM – Oct. 9, 2023, 10:15 AM

  Presenters

  • Mark J Kushner

    • University of Michigan

  Authors

  • Mark J Kushner

    • University of Michigan

  • Steven Shannon

    • North Carolina State University

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• Overview of Opportunities for Plasma Science and Engineering in Microelectronics Fabrication

  ORAL · Invited

  Oct. 9, 2023, 10:15 AM – Oct. 9, 2023, 10:50 AM

  Presenters

  • David B Graves

    • Princeton University

  Authors

  • David B Graves

    • Princeton University

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• The Future Challenges of Semiconductor Processing

  ORAL · Invited

  Oct. 9, 2023, 10:50 AM – Oct. 9, 2023, 11:25 AM

  Presenters

  • Aaron Wilson

    • Micron Technology Inc.

  Authors

  • Aaron Wilson

    • Micron Technology Inc.

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• Lunch

  COFFEE_KLATCH

  Oct. 9, 2023, 11:25 AM – Oct. 9, 2023, 12:55 PM

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• Opportunities for Plasma Science and Engineering in Micro Electronics: The Grand Challenges Facing Equipment Manufacturers

  ORAL · Invited

  Oct. 9, 2023, 12:55 PM – Oct. 9, 2023, 1:30 PM

  Presenters

  • Alex Paterson

    • Lam Research

  Authors

  • Alex Paterson

    • Lam Research

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• Overcoming Challenges in Semiconductor Manufacturing: Bridging Engineering and Science

  ORAL · Invited

  Oct. 9, 2023, 1:30 PM – Oct. 9, 2023, 2:05 PM

  Presenters

  • Sang Ki Nam

    • Samsung Electronics

  Authors

  • Sang Ki Nam

    • Samsung Electronics

  • Sang Wuk Park

    • Samsung Electronics

  • Bong Jin Kuh

    • Samsung Electronics

  • Doug-yong Sung

    • Samsung Electronics

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• Challenges in Plasma Surface Interactions Control for Microelectronics Nanofabrication

  ORAL · Invited

  Oct. 9, 2023, 2:05 PM – Oct. 9, 2023, 2:40 PM

  Presenters

  • Gottlieb Oehrlein

    • University of Maryland

  Authors

  • Gottlieb Oehrlein

    • University of Maryland

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• High-Performance Computing in Plasma Reactor Scale Simulations: A Review and Prospects

  ORAL · Invited

  Oct. 9, 2023, 2:40 PM – Oct. 9, 2023, 3:15 PM

  Presenters

  • Laxminarayan L Raja

    • The University of Texas at Austin

  Authors

  • Laxminarayan L Raja

    • The University of Texas at Austin

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• Coffee Break

  COFFEE_KLATCH

  Oct. 9, 2023, 3:15 PM – Oct. 9, 2023, 3:30 PM

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• Profile Simulation for Advanced Semiconductor Fabrication: Challenges and Opportunities from the Etch Perspective

  ORAL · Invited

  Oct. 9, 2023, 3:30 PM – Oct. 9, 2023, 4:05 PM

  Presenters

  • Du Zhang

    • TEL Technology Center, America, LLC

  Authors

  • Du Zhang

    • TEL Technology Center, America, LLC

  • Toru Hisamatsu

    • TEL Technology Center, America, LLC

  • Akiteru Ko

    • TEL TECHNOLOGY CENTER, AMERICA, LLC
    • TEL Technology Center, America, LLC

  • Peter Biolsi

    • TEL Technology Center, America, LLC

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• Role of Machine Learning

  ORAL · Invited

  Oct. 9, 2023, 4:05 PM – Oct. 9, 2023, 4:40 PM

  Presenters

  • Satoshi Hamaguchi

    • Osaka University, Japan
    • Osaka University

  Authors

  • Satoshi Hamaguchi

    • Osaka University, Japan
    • Osaka University

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• Break

  COFFEE_KLATCH

  Oct. 9, 2023, 4:40 PM – Oct. 9, 2023, 4:50 PM

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• Panel Discussion

  COFFEE_KLATCH

  Oct. 9, 2023, 4:50 PM – Oct. 9, 2023, 5:30 PM

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