Low Pressure Capacitively Coupled Plasmas

Presentations

• Electron power absorption mode transitions in low-pressure capacitively coupled plasmas in gas mixtures

  ORAL · Invited

  Oct. 12, 2023, 1:30 PM – Oct. 12, 2023, 2:00 PM

  Presenters

  • Aranka Derzsi

    • Wigner Research Center for Physics

  Authors

  • Aranka Derzsi

    • Wigner Research Center for Physics

  • Máté Vass

    • Ruhr-Universität Bochum
    • Ruhr University Bochum, Germany

  • Ranna Masheyeva

    • Wigner Research Centre for Physics

  • Benedek Horvath

    • Wigner Research Center for Physics

  • Ihor Korolov

    • Ruhr-University Bochum

  • Julian Schulze

    • Bochum University
    • Ruhr University Bochum, Germany
    • Ruhr-University Bochum

  • Zoltán Donkó

    • Wigner Research Centre for Physics
    • Wigner Research Centre for Physics, Hungary
    • 1. Wigner Research Centre for Physics, Hungary 2. Osaka University, Japan

  • Peter Hartmann

    • Wigner Research Center for Physics

  View abstract →

• Abstract Withdrawn

  COFFEE_KLATCH

  Oct. 12, 2023, 2:00 PM – Oct. 12, 2023, 2:15 PM

  View abstract →

• The effects of different boundary surface materials on the electron power absorption dynamics in capacitive RF plasmas

  ORAL

  Oct. 12, 2023, 2:15 PM – Oct. 12, 2023, 2:30 PM

  Presenters

  • Julian Schulze

    • Bochum University
    • Ruhr University Bochum, Germany
    • Ruhr-University Bochum

  Authors

  • Julian Schulze

    • Bochum University
    • Ruhr University Bochum, Germany
    • Ruhr-University Bochum

  • Florian Beckfeld

    • Ruhr-University Bochum

  • Ranna Masheyeva

    • Wigner Research Centre for Physics

  • David Schulenberg

    • Ruhr-University Bochum

  • Ihor Korolov

    • Ruhr-University Bochum

  • Claudia Bock

    • Ruhr-University Bochum

  • Zoltán Donkó

    • Wigner Research Centre for Physics
    • Wigner Research Centre for Physics, Hungary
    • 1. Wigner Research Centre for Physics, Hungary 2. Osaka University, Japan

  View abstract →

• A hybrid surface cavity microwave source with a capacitively coupled plasma for plasma uniformity control

  ORAL

  Oct. 12, 2023, 2:30 PM – Oct. 12, 2023, 2:45 PM

  Presenters

  • Navheen Shanmugham Murugesan

    • The University of Texas at Austin

  Authors

  • Navheen Shanmugham Murugesan

    • The University of Texas at Austin

  • Laxminarayan L Raja

    • The University of Texas at Austin

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• Coupled ion-ion oscillation and periodic emission pattern in electronegative capacitively coupled radio-frequency plasmas

  ORAL

  Oct. 12, 2023, 2:45 PM – Oct. 12, 2023, 3:00 PM

  Presenters

  • Tianhong Wang

    • Applied Materials
    • Applied Materials, Inc.

  Authors

  • Tianhong Wang

    • Applied Materials
    • Applied Materials, Inc.

  • Shahid Rauf

    • Applied Materials, Inc.
    • Applied Materials

  • Niklas Friedrichs

    • Ruhr-University Bochum

  • Ihor Korolov

    • Ruhr-University Bochum

  • Jason Kenney

    • Applied Materials
    • Applied Materials, Inc
    • Applied Materials, Inc.

  • Julian Schulze

    • Bochum University
    • Ruhr University Bochum, Germany
    • Ruhr-University Bochum

  View abstract →

• Two-dimensional kinetic modeling of a weakly magnetized Capacitively Coupled Plasma Discharge in cylindrical geometry.

  ORAL

  Oct. 12, 2023, 3:00 PM – Oct. 12, 2023, 3:15 PM

  Presenters

  • Willca Villafana

    • Princeton Plasma Physics Laboratory

  Authors

  • Willca Villafana

    • Princeton Plasma Physics Laboratory

  • Shahid Rauf

    • Applied Materials

  • Igor D Kaganovich

    • Princeton Plasma Physics Laboratory

  View abstract →

• Discharge properties of a cylindrical capacitively coupled plasma discharge with an axisymmetric magnetic field

  ORAL

  Oct. 12, 2023, 3:15 PM – Oct. 12, 2023, 3:30 PM

  Publication: Dahiya, S., Singh, P., Patil, Y., Sharma, S., Sirse, N. and Karkari, S.K., 2023. Discharge characteristics of a low-pressure geometrically asymmetric cylindrical capacitively coupled plasma with an axisymmetric magnetic field. arXiv preprint arXiv:2306.00594.

  Presenters

  • Swati Swati

    • Institute for Plasma Research
    • Institute for Plasma Research, A CI of Homi Bhabha National Institute, Bhat, Gandhinagar382428

  Authors

  • Swati Swati

    • Institute for Plasma Research
    • Institute for Plasma Research, A CI of Homi Bhabha National Institute, Bhat, Gandhinagar382428

  • Pawandeep Singh

    • Institute for Plasma Research

  • Sarveshwar Sharma

    • Institute for Plasma Research, A CI of Homi Bhabha National Institute, Bhat, Gandhinagar382428

  • Nishant Sirse

    • Institute of Science & Research and Centre for Scientific & Applied Research, IPS Academy, Indore-452012, India

  • Shantanu K Karkari

    • Institute for Plasma Research

  View abstract →