Atomic oxygen interaction with surface materials in oxygen-containing plasmas

POSTER

Abstract

Heterogeneous surface kinetics plays a role in most plasma processes, where surfaces interact either with active discharges or their afterglow. It can affect both plasma and surface properties. In this work we employ deterministic and Kinetic Monte Carlo methods to simulate the surface kinetics of oxygen species in oxygen and carbon dioxide glow discharges interacting with silica-based materials. This description includes physisorption and chemisorption of oxygen atoms at the surface, together with their desorption, surface diffusion and recombination back into gaseous molecular oxygen. We further describe the formation of dangling bonds due to the arrival of fast particles to the surface. The simulation results are validated by comparisons with experimental measurements of atomic oxygen loss frequency. The change in the recombination regime experimentally observed at pressures around 1 Torr is well captured by the model.

*This work was partially supported by the Portuguese FCT-Fundação para a Ciência e a Tecnologia, under projects UIDB/50010/2020, UIDP/50010/2020 and PTDC/FISPLA/1616/2021 (PARADiSE).

Presenters

  • Pedro Viegas

    • Instituto Superior Técnico - Universidade de Lisboa

Authors

  • Pedro Viegas

    • Instituto Superior Técnico - Universidade de Lisboa

  • Jorge Silveira

    • Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico - Universidade de Lisboa

  • José Afonso

    • Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico - Universidade de Lisboa

  • Ana Sofia Morillo-Candas

    • Laboratoire de Physique des Plasmas (LPP), CNRS, Sorbonne Université, École Polytechnique, Institut Polytechnique de Paris

  • Luca Vialetto

    • Theoretical Electrical Engineering, Faculty of Engineering, Kiel University
    • Kiel University

  • Vasco Guerra

    • Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico - Universidade de Lisboa
    • Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Lisbon, Portugal
    • Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa
    • Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Portugal
    • Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais 1, 1049-001 Lisboa, Portugal