Extraordinary field emission of diamond film developed by microwave plasma jet chemical vapor deposition

POSTER

Abstract

The present work reports both numerical and experimental studies of reconditioning a microwave plasma jet chemical vapor deposition (MPJCVD) system for diamond film growth. A three-dimensional plasma fluid model is constructed for understanding and conditioning the MPJCVD system and optimizing its operating conditions. The methodology solves electromagnetic waves and plasma dynamics selfconsistently using an adaptive finite element method. The whole system has been modeled under varying parameters including the reactor geometry, microwave power, and working gas pressure. Using an operating condition identical to the optimized simulation results, the thin diamond film has been fabricated successfully. The SEM image reveals the presence of a diamond film uniformly distributed with particles at a size of ~1 mm. The field emission from the diamond film grown from this MPJCVD shows extraordinary properties, i.e., extremely low turn-on voltage and high current density. The turn-on electric field could be as low as ~4 V/mm. This work provides more physical insights of the system and improves the performance of design. It may find applications in surface hardening and bright field electron emission.

*This work was partially supported by the BK21 FOUR (Fostering Outstanding Universities for Research) program through the National Research Foundation (NRF) funded by the Ministry of Education of Korea, the X-mind Crops program of NRF, ICT (NRF-2017H1D8A1032167), Hanyang University (HY-201400000002393) in Korea, and Mastek Technologies, Inc. in Taiwan.

Presenters

  • Jing-Shyang Yen

    • Department of Electronic Engineering, National Taipei University of Technology

Authors

  • Chun-Yu Lin

    • Department of Mechanical Engineering, National Taipei University of Technology

  • Jing-Shyang Yen

    • Department of Electronic Engineering, National Taipei University of Technology

  • Kaviya Aranganadin

    • Multidisciplinary Computational Laboratory, Department of Electrical and Biomedical Engineering, Hanyang University

  • Chi-Wen Liu

    • Department of Mechanical Engineering, National Taipei University of Technology

  • Chii-Ruey Lin

    • Department of Mechanical Engineering, Minghsin University of Science and Technology

  • Jwo-Shiun Sun

    • Department of Electronic Engineering, National Taipei University of Technology

  • Hua-Yi Hsu

    • Department of Mechanical Engineering, National Taipei University of Technology

  • Ming-Chieh Lin

    • Multidisciplinary Computational Laboratory, Department of Electrical and Biomedical Engineering, Hanyang University