Elemental gradient functional thin film production for hydrogen entry prevention using powder target
POSTER
Abstract
Nickel-doped stainless steel thin films with high hydrogen-entry resistance were prepared on a metal and Si surface via sputter deposition. Mixed nickel oxide and stainless steel powders were used as the sputtering target. The experimental results indicated that nickel-doped stainless steel thin films could successfully be prepared both on the stainless steel and Si substrate surface. Deposition rate was dependent on the processing conditions such as input RF power, and the thin film Ni/SUS304 concentration ratio strongly depended on the powder target composition.
*This work was supported by JSPS KAKENHI, Grant-in-Aid for Scientific Research (A) Grant Number 18H03848, Grant-in-Aid for Scientific Research (C) Grant Numbers 23340181, 16K04999, 19K03045 and 20K03264. This work was also supported by Nippon Sheet Glass Foundation for Materials Science and Engineering, Nagoya University, Joining and Welding Research Institute, Osaka University, Toyohasi and Nagaoka University of Technologies.
Presenters
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Hiroharu Kawasaki
- Electronics and Electrical Engineering, National Institute o