Position dependence diagnosis of electron temperature and density of inductively coupled argon plasma based on Abel inverted optical emission spectroscopic measurement and collisional-radiative model

The position dependence of spectral emission coefficient of 1 Pa inductively coupled argon (Ar) plasmas was measured by Abel inverted optical emission spectroscopic measurement (OES). The radial dependence of electron temperature and density were diagnosed from the reduced population density distribution based on the Ar collisional-radiative model. The position dependence diagnosis of electron temperature and density was realized by OES. The electron temperature decreased from the center to the outer edge.