Magnetron Plasmas

FOCUS · FR1 · ID: 546114

Presentations

  • ORAL · Invited

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    Publication: Zheng, B., Fu, Y., Wang, K., Schuelke, T., & Fan, Q. H. (2021). Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target. Plasma Sources Science and Technology, 30(3), 035019. http://dx.doi.org/10.1088/1361-6595/abe9f9

    Presenters

    • Bocong Zheng

      • Fraunhofer USA

    Authors

    • Bocong Zheng

      • Fraunhofer USA

    • Yangyang Fu

      • Tsinghua University

    • Keliang Wang

      • Fraunhofer USA

    • Thomas Schuelke

      • Fraunhofer USA

    • Qi Hua Fan

      • Michigan State University

    View abstract →

  • ORAL

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    Publication: [1] C. Huo et al., Journal of Physics D:Applied Physics 50, 354003 (2017).
    [2] H. Eliasson et al. Plasma Sources Science and Technology 30, 115017 (2021)

    Presenters

    • Jon T Gudmundsson

      • University of Iceland

    Authors

    • Henrik Eliasson

      • Linkoping University

    • Martin Rudolph

      • Leibniz Institute of Surface Engineering (IOM)

    • Kateryna Barynova

      • University of Iceland

    • Nils Brenning

      • KTH Royal Institute of Technology

    • Michael A Raadu

      • KTH Royal Institute of Technology

    • Hamidreza Hajihoseini

      • University of Twente

    • Tiberiu M Minea

      • Laboratoire de Physique des Gaz et Plasmas-LPGP, Universite Paris-Saclay

    • Daniel Lundin

      • Linkoping University

    • Jon T Gudmundsson

      • University of Iceland

    View abstract →

  • ORAL

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    Presenters

    • Ming-Chieh Lin

      • Multidisciplinary Computational Laboratory, Department of Electrical and Biomedical Engineering, Hanyang University

    Authors

    • Kaviya Aranganadin

      • Multidisciplinary Computational Laboratory, Department of Electrical and Biomedical Engineering, Hanyang University

    • Guoning Wang

      • Multidisciplinary Computational Laboratory, Department of Electrical and Biomedical Engineering, Hanyang University

    • Hua-Yi Hsu

      • Department of Mechanical Engineering, National Taipei University of Technology

    • John P. Verboncoeur

      • Michigan State University
      • Department of Electrical and Computer Engineering, Michigan State University

    • Ming-Chieh Lin

      • Multidisciplinary Computational Laboratory, Department of Electrical and Biomedical Engineering, Hanyang University

    View abstract →

  • ORAL

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    Publication: "Electron dynamics in magnetized CCRF discharges: I. The mechanism of Hall heating and the mu-mode", planned to be submitted to PSST

    Presenters

    • Denis Eremin

      • Ruhr Univ Bochum

    Authors

    • Denis Eremin

      • Ruhr Univ Bochum

    • Birk Berger

      • Ruhr Univ Bochum

    • Jens Kallähn

      • Ruhr Univ Bochum
      • Ruhr University Bochum

    • Kevin Köhn

      • Ruhr Univ Bochum

    • Dennis Krueger

      • Ruhr Univ Bochum

    • Liang Xu

      • Ruhr Univ Bochum

    • Peter Awakowicz

      • Institute of Electrical Engineering and Plasma Technology, Ruhr University Bochum.
      • Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany
      • Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Sciences, Ruhr University Bochum, Bochum, Germany.
      • Ruhr Univ Bochum
      • Ruhr University Bochum

    • Julian Schulze

      • Ruhr-University Bochum
      • Ruhr Univ Bochum
      • Ruhr University Bochum, Dalian University of Technology
      • Ruhr-University Bochum, Germany

    • Ralf Peter Brinkmann

      • Ruhr Univ Bochum

    View abstract →