Study on Light Emission of Arcing Before Arcing Explosion in a Low-Temperature Plasma

ORAL

Abstract

Although arcing is a ubiquitous phenomenon and one of the most critical issues in low-temperature plasma engineering, its mechanism has not been fully understood yet. To elucidate its mechanism, we investigated light emission of arcing in the initiation phase with an ultra-fast high-speed camera. As arcing occurs randomly in space, we employed an arcing inducing probe (AIP) designed to localized arcing on its probe tip edge. In this presentation, we report the observation of light emissions that occur before arcing current initiation (arcing explosion) and the validation of measurement results. Furthermore, we explore the evolution behavior of arcing in the initiation phase with a multiple-snapshot method. This research will contribute to understanding arcing evolution and underlying physics

*This research was supported by the National Research Council of Science & Technology (NST) grant by the Korea government (MSIP) (No. CAP-17-02-NFRI, CRF-20-01-NFRI), by Next-generation Intelligence semiconductor R&D Program through the Korea Evaluation Institute of Industrial Technology(KEIT) funded by the Korea government(MOTIE), by the Korea Institute of Energy Technology Evaluation and Planning (KETEP) and the MOTIE of the Republic of Korea (20202010100020), by the MOTIE(20009818, 20010420) and KSRC(Korea Semiconductor Research Consortium) support program for the development of the future semiconductor device, by Korea Institute for Advancement of Technology(KIAT) grant funded by the Korea Government(MOTIE)(P0008458, HRD Program for Industrial Innovation), by a Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2020R1A6A1A03047771), and by KIMM Institutional Program (NK236F) and NST/KIMM.

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Presenters

  • SiJun Kim

    • Chungnam Natl Univ

Authors

  • SiJun Kim

    • Chungnam Natl Univ

  • Chul-hee Cho

    • Chungnam National University

  • Min-su Choi

    • Chungnam National University

  • Young-seok Lee

    • Chungnam National University

  • In-ho Seong

    • Chungnam National University

  • Won-nyoung Jeong

    • Chungnam National University

  • Ye-bin You

    • Chungnam National University

  • Byeong-yeop Choi

    • Chungnam National University

  • Jang-jae Lee

    • Samsung Electronics Co., Ltd

  • Shin-jae You

    • Chungnam National University