Capacitively Coupled Plasmas II

Presentations

• Experimental and computational study of the electron power absorption in capacitively coupled neon-oxygen plasmas

  ORAL

  Oct. 6, 2022, 1:30 PM – Oct. 6, 2022, 1:45 PM

  Presenters

  • Aranka Derzsi

    • Wigner Research Centre for Physics, Hung
    • Wigner Research Centre, Hungary

  Authors

  • Aranka Derzsi

    • Wigner Research Centre for Physics, Hung
    • Wigner Research Centre, Hungary

  • Peter Hartmann

    • Wigner Research Centre for Physics

  • Mate Vass

    • Ruhr University Bochum, Wigner Research Centre for Physics

  • Benedek Horvath

    • Wigner Research Center for Physics

  • Marton Gyulai

    • Wigner Research Centre for Physics

  • Ihor Korolov

    • Ruhr University Bochum
    • Bochum University

  • Julian Schulze

    • Ruhr-University Bochum
    • Ruhr Univ Bochum
    • Ruhr University Bochum, Dalian University of Technology
    • Ruhr-University Bochum, Germany

  • Zoltán Donkó

    • Wigner Research Centre for Physics

  View abstract →

• Effect of voltage waveform tailoring and an additional 60 MHz frequency on the ion flux energy distribution function in a low pressure capacitively coupled radio frequency plasma

  ORAL

  Oct. 6, 2022, 1:45 PM – Oct. 6, 2022, 2:00 PM

  Presenters

  • Gerrit Hübner

    • Ruhr Universität Bochum

  Authors

  • Gerrit Hübner

    • Ruhr Universität Bochum

  • Ihor Korolov

    • Ruhr University Bochum
    • Ruhr-Uni­ver­si­tät Bo­chum
    • Ruhr-University Bochum

  • Stefan Ries

    • Ruhr-Uni­ver­si­tät Bo­chum

  • Soheil Karimi Aghda

    • RWTH Aachen

  • Jochen M Schneider

    • RWTH Aachen

  • Jan Trieschmann

    • Kiel University
    • Christian-Albrechts-Universität zu Kiel
    • Theoretical Electrical Engineering, Faculty of Engineering, Kiel University

  • Thomas Mussenbrock

    • Ruhr University Bochum
    • Bochum University
    • Ruhr-Uni­ver­si­tät Bo­chum
    • Applied Electrodynamics and Plasma Technology, Department of Electrical Engineering and Information Sciences, Ruhr Uni­ver­si­ty Bo­chum

  • Julian Schulze

    • Ruhr University Bochum
    • Bochum University
    • Ruhr-Uni­ver­si­tät Bo­chum
    • Ruhr University Bochum, Germany
    • Ruhr-University Bochum; Dalian University of Technology
    • Ruhr-University Bochum

  • Peter Awakowicz

    • Chair of Electrical Engineering and Plasma Technology, Ruhr-Universität Bochum, Germany
    • Ruhr University Bochum
    • Ruhr-Uni­ver­si­tät Bo­chum

  • Tobias Gergs

    • Ruhr University Bochum

  View abstract →

• Stratification of Capacitively Coupled Plasma in Noble Gases

  ORAL

  Oct. 6, 2022, 2:00 PM – Oct. 6, 2022, 2:15 PM

  Presenters

  • Robert Arslanbekov

    • CFD Research Corporation

  Authors

  • Vladimir I Kolobov

    • CFDRC, University of Alabama in Huntsville

  • Robert Arslanbekov

    • CFD Research Corporation

  View abstract →

• The mechanism of frequency coupling in low pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis

  ORAL

  Oct. 6, 2022, 2:15 PM – Oct. 6, 2022, 2:30 PM

  Publication: Vass M, Wang L, Wilczek S, Lafleur T, Brinkmann R P, Donko Z and Schulze J, "Frequency coupling in low pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis", submitted to PSST
  
  

  Presenters

  • Máté Vass

    • Ruhr University Bochum, Germany
    • Department of Electrical Engineering and Information Science, Ruhr-University Bochum, 44780 Bochum, Germany

  Authors

  • Máté Vass

    • Ruhr University Bochum, Germany
    • Department of Electrical Engineering and Information Science, Ruhr-University Bochum, 44780 Bochum, Germany

  • Li Wang

    • Dalian University of Technology
    • Ruhr-University Bochum

  • Sebastian Wilczek

    • Ruhr University Bochum

  • Trevor Lafleur

    • ThrustMe
    • ThrustMe, Verrières-le-Buisson F-91370, France

  • Ralf Peter Brinkmann

    • Ruhr Univ Bochum

  • Zoltan Donko

    • Wigner Research Center
    • Wigner Research Center for Physics

  • Julian Schulze

    • Ruhr University Bochum
    • Bochum University
    • Ruhr-Uni­ver­si­tät Bo­chum
    • Ruhr University Bochum, Germany
    • Ruhr-University Bochum; Dalian University of Technology
    • Ruhr-University Bochum

  View abstract →

• Pressure dependence on spatio-temporal distribution of excitation rates of Ar 2p₁ and Ne 2p₁ in Ar and Ar/Ne capacitively coupled plasmas

  ORAL

  Oct. 6, 2022, 2:30 PM – Oct. 6, 2022, 2:45 PM

  Presenters

  • Michihiro Otaka

    • Kyushu University, Japan

  Authors

  • Michihiro Otaka

    • Kyushu University, Japan

  • Toshiaki Arima

    • Kyushu University, Japan

  • Jian-syun Lai

    • Kyushu University, Japan

  • Kizuki Ikeda

    • Kyushu University, Japan

  • Kunihiro Kamataki

    • Kyushu Univ
    • Kyushu University
    • Kyushu University, Japan

  • Naoto Yamashita

    • Kyushu University
    • Kyushu University, Japan

  • Takamasa Okumura

    • Kyushu University
    • Kyushu University, Japan

  • Naho Itagaki

    • Kyushu University
    • Kyushu University, Japan

  • Kazunori Koga

    • Kyushu Univ
    • Kyushu University
    • Kyushu University, Japan

  • Masaharu Shiratani

    • Kyushu University
    • Kyushu University, Japan

  View abstract →

• Generation of surface modes and plasma uniformity in VHF CCP reactors studied with a EM PIC code

  ORAL

  Oct. 6, 2022, 2:45 PM – Oct. 6, 2022, 3:00 PM

  Presenters

  • Denis Eremin

    • Ruhr Univ Bochum

  Authors

  • Denis Eremin

    • Ruhr Univ Bochum

  • Efe Kemaneci

    • Institute of Theoretical Electrical Engineering, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany
    • Ruhr Univ Bochum

  • Masaaki Matsukuma

    • Tokyo Electron Technology Solutions Limited
    • TEL

  • Thomas Mussenbrock

    • Ruhr University Bochum
    • Bochum University
    • Ruhr-Uni­ver­si­tät Bo­chum
    • Applied Electrodynamics and Plasma Technology, Department of Electrical Engineering and Information Sciences, Ruhr Uni­ver­si­ty Bo­chum

  • Ralf Peter Brinkmann

    • Ruhr Univ Bochum

  View abstract →

• Current and voltage (I-V) characteristics of intermediate pressure plasma

  ORAL

  Oct. 6, 2022, 3:00 PM – Oct. 6, 2022, 3:15 PM

  Presenters

  • Shadhin Hussain

    • University of Texas at Dallas

  Authors

  • Shadhin Hussain

    • University of Texas at Dallas

  • Matthew Goeckner

    • University of Texas at Dallas

  View abstract →

• Wave Characteristics in E×B Source: Pressure-Dependent Evolution of Plasma Oscillation Phenomena

  ORAL

  Oct. 6, 2022, 3:15 PM – Oct. 6, 2022, 3:30 PM

  Presenters

  • Cheongbin Cheon

    • Department of Electrical Engineering, Pusan National University, Busan, Korea

  Authors

  • June Young Kim

    • Department of Nuclear Engineering, Seoul National University, Seoul, Korea
    • Seoul National University

  • Cheongbin Cheon

    • Department of Electrical Engineering, Pusan National University, Busan, Korea

  • Jinyoung Choi

    • Department of Nuclear Engineering, Seoul National University, Seoul, Korea

  • Y. S. Hwang

    • Seoul National University
    • Department of Nuclear Engineering, Seoul National University, Seoul, Korea
    • Department of Nuclear Engineering, Seoul National University, Seoul, 08826, S. Korea

  • Kyoung-Jae Chung

    • Seoul National University
    • Department of Nuclear Engineering, Seoul National University, Seoul, Korea
    • Department of Nuclear Engineering, Seoul National University, Seoul, 08826, S. Korea

  • Hae June Lee

    • Pusan Natl Univ
    • Pusan National University
    • Department of Electrical Engineering, Pusan National University, Busan, Korea

  View abstract →