Reactive Plasma Award Talk

Presentations

• Evolution of reactive plasma processes by radical control

  ORAL · Invited

  Oct. 5, 2022, 11:00 AM – Oct. 5, 2022, 12:00 PM

  Presenters

  • Masaru Hori

    • Nagoya Univ
    • Nagoya University
    • Center for Low-temperature Plasma Sciences, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan.

  Authors

  • Masaru Hori

    • Nagoya Univ
    • Nagoya University
    • Center for Low-temperature Plasma Sciences, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan.

  View abstract →