Spectra of a geometry improved ideal model of the pMRP

ORAL

Abstract

The planar multipole resonance probe (pMRP) is a diagnostic-tool based on the concept of active plasma resonance spectroscopy (APRS), which excites the plasma in the GHz range and records the response to detect resonances. Due to its planar design the pMRP is especially suited to monitor plasma processes without perturbing them. To determine plasma parameter from measured resonances, a model for the relation between plasma and resonance parameter is required. Previous work showed a deviation of the analytical solution for the ideal model to the full 3D electromagnetic simulations of the real pMRP. This difference is mainly caused by the idealized geometry instead of the electrostatic approximation in the analytical model. To allow for a better agreement of the spectra the model of the pMRP can be improved with a more realistic geometry, but requires partially numerical calculations which can still be applied in the functional analytic approach. The resulting spectra will be compared to full electromagnetic simulations and former analytical results.

*The authors gratefully acknowledge funding by the German Research Foundation (DFG) within the project OB 469/1-1.

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Presenters

  • Michael Friedrichs

Authors

  • Michael Friedrichs

  • Jens Oberrath

    • South Westphalia University of Applied Sciences
    • South Westphalia University of Applied Science

  • Dennis Pohle

    • Ruhr University Bochum, Institute of Microwave Systems

  • Ilona Rolfes

    • Ruhr University Bochum, Institute of Microwave Systems

  • Chunjie Wang

    • Ruhr University Bochum, Institute of Theoretical Electrical Engineering

  • Ralf Peter Brinkmann

    • Ruhr University Bochum, Institute of Theoretical Electrical Engineering
    • Institute of Theoretical Electrical Engineering, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany