2d spatially resolved O atom density profiles in an atmospheric pressure plasma jet: from the active plasma volume to the effluent

ORAL

Abstract

Micro atmospheric pressure plasma jets (µAPPJs) are attracting high attention due to their potential to treat temperature sensitive surfaces. For these applications, reactive species are produced in the plasma. In this work two-dimensional spatially resolved absolute atomic oxygen densities are measured within a µAPPJ (COST-Jet) and in its effluent. The plasma is operated in helium with an admixture of 0.5% of oxygen at 13.56 MHz and with a power of 1 W.  Absolute atomic oxygen densities are obtained using two photon absorption laser induced fluorescence spectroscopy (TALIF). The results are reproduced by a combination of phase resolved optical emission spectroscopy (PROES) measurements and simple model calculations. Within the discharge, the atomic oxygen density builds up with a rise time of 600 µs along the gas flow and reaches a plateau of 8x1015 cm-3. In the effluent, the density decays exponentially with a decay time of 180 µs (corresponding to a decay length of 3 mm at a gas flow of 1.0 slm). It is found that both, the species formation behavior and the maximum distance between the jet nozzle and substrates for possible oxygen treatments of surfaces can be controlled by adjusting the gas flow.

*This work is supported by the DFG via SFB 1316 (projects A4 and B2).

–

Publication: D Steuer et al 2021 J. Phys. D: Appl. Phys. in press https://doi.org/10.1088/1361-6463/ac09b9

Presenters

  • David Steuer

    • Plasma Interface Physics, Ruhr-University Bochum, D-44801 Bochum, Germany
    • Experimental Physics II, Faculty of Physics and Astronomy, Ruhr-University Bochum, Germany
    • RUB Physik EPII; CRC 1316

Authors

  • David Steuer

    • Plasma Interface Physics, Ruhr-University Bochum, D-44801 Bochum, Germany
    • Experimental Physics II, Faculty of Physics and Astronomy, Ruhr-University Bochum, Germany
    • RUB Physik EPII; CRC 1316

  • Ihor Korolov

    • Ruhr Univ Bochum
    • Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany
    • Ruhr-Universität Bochum, Germany
    • Ruhr University Bochum
    • Bochum University
    • Ruhr Univ Bochum, Germany
    • Ruhr-University Bochum
    • Ruhr-University Bochum, Germany

  • Sascha Chur

    • Ruhr-University Bochum
    • RUB Physik EPII; CRC 1316

  • Julian Schulze

    • University of Bochum, Germany
    • Ruhr-Universität Bochum, Germany
    • Ruhr Univ Bochum
    • Bochum University
    • Ruhr University Bochum & Dalian University of Technology
    • Ruhr University Bochum, 44780 Bochum, Germany
    • Ruhr University Bochum
    • Ruhr University Bochum and Dalian University of Technology
    • Ruhr-University Bochum, Germany; Dalian University of Technology, China

  • Volker Schulz-von der Gathen

    • Ruhr-University Bochum
    • 1Ruhr-University Bochum, Experimental Physics II
    • Experimental Physics II: Physics of Reactive Plasmas, Ruhr-University Bochum, D-44801 Bochum, Germany

  • Judith Golda

    • Ruhr-University Bochum
    • 3Ruhr-University Bochum, Plasma Interface Physics
    • RUB Physik EPII; CRC 1316
    • Plasma Interface Physics, Ruhr-University Bochum, D-44801 Bochum, Germany

  • Marc Böke

    • Ruhr-University Bochum
    • Experimental Physics II, Faculty of Physics and Astronomy, Ruhr-University Bochum, Germany
    • 1Ruhr-University Bochum, Experimental Physics II
    • RUB Physik EPII; CRC 1316