Magnetically Enhanced Plasmas

Presentations

• Operating modes of a magnetized direct-current discharge in helium

  ORAL

  Oct. 6, 2021, 3:45 PM – Oct. 6, 2021, 4:00 PM

  Publication: D. Levko, R. R. Upadhyay and L. L. Raja, J. Appl. Phys. 129, 183307 (2021)

  Presenters

  • Dmitry Levko

    • Esgee Technologies

  Authors

  • Dmitry Levko

    • Esgee Technologies

  • Rochan Upadhyay

    • Esgee Technologies

  • Laxminarayan L Raja

    • University of Texas at Austin
    • The University of Texas at Austin

  View abstract →

• Electron heating transition in direct current magnetron sputtering discharges

  ORAL

  Oct. 6, 2021, 4:00 PM – Oct. 6, 2021, 4:15 PM

  Publication: Bocong Zheng, Yangyang Fu, Huihui Wang, Keliang Wang, Thomas Schuelke, Qi Hua Fan, Breathing oscillation and electron energization in magnetron discharges. [In preparation]

  Presenters

  • Bocong Zheng

    • Fraunhofer USA
    • Fruahnhofer Institute
    • Michigan State University

  Authors

  • Bocong Zheng

    • Fraunhofer USA
    • Fruahnhofer Institute
    • Michigan State University

  • Yangyang Fu

    • Tsinghua University

  • Huihui Wang

    • Tsinghua University

  • Keliang Wang

    • Fraunhofer USA

  • Thomas Schuelke

    • Fraunhofer USA

  • Qi Hua Fan

    • Michigan State University

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• Fundamental investigations of the hysteresis effect in magnetically enhanced reactive sputter processes

  ORAL

  Oct. 6, 2021, 4:15 PM – Oct. 6, 2021, 4:30 PM

  Presenters

  • Birk Berger

    • Ruhr-University Bochum, Germany
    • Ruhr Univ Bochum

  Authors

  • Birk Berger

    • Ruhr-University Bochum, Germany
    • Ruhr Univ Bochum

  • Julian Roggendorf

    • Ruhr Univ Bochum

  • Dennis Engel

    • Ruhr Univ Bochum

  • Christian Woelfel

    • Ruhr Univ Bochum

  • Denis Eremin

    • Ruhr Univ Bochum

  • Jan Lunze

    • Ruhr Univ Bochum

  • Ralf Peter Brinkmann

    • Ruhr Univ Bochum
    • Ruhr University Bochum

  • Peter Awakowicz

    • Ruhr-University Bochum
    • Ruhr University Bochum
    • Ruhr Univ Bochum
    • Ruhr-University Bochum, Germany

  • Julian Schulze

    • Ruhr University Bochum
    • Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany
    • Ruhr Univ Bochum
    • Ruhr-University Bochum, Germany; Dalian University of Technology, China
    • Ruhr University Bochum, Dalian University of Technology
    • Ruch Univ Bochum, Germany
    • Ruhr-University Bochum

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• Plasma series resonance in capacitive discharges with transverse magnetic field

  ORAL

  Oct. 6, 2021, 4:30 PM – Oct. 6, 2021, 4:45 PM

  Presenters

  • Dennis Engel

    • Ruhr Univ Bochum

  Authors

  • Dennis Engel

    • Ruhr Univ Bochum

  • Birk Berger

    • Ruhr-University Bochum, Germany
    • Ruhr Univ Bochum

  • Christian Woelfel

    • Ruhr Univ Bochum

  • Jan Lunze

    • Ruhr Univ Bochum

  • Peter Awakowicz

    • Ruhr Univ Bochum
    • Ruhr University Bochum

  • Julian Schulze

    • University of Bochum, Germany
    • Ruhr-Universität Bochum, Germany
    • Ruhr Univ Bochum
    • Bochum University
    • Ruhr University Bochum & Dalian University of Technology
    • Ruhr University Bochum, 44780 Bochum, Germany
    • Ruhr University Bochum
    • Ruhr University Bochum and Dalian University of Technology
    • Ruhr-University Bochum, Germany; Dalian University of Technology, China

  • Denis Eremin

    • Ruhr Univ Bochum

  • Ralf Peter Brinkmann

    • Ruhr Univ Bochum
    • Ruhr University Bochum

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• Identification of gradient drift instability evolving into a rotating spoke in a crossed field plasma

  ORAL

  Oct. 6, 2021, 4:45 PM – Oct. 6, 2021, 5:00 PM

  Publication: Liang Xu, Denis Eremin and Ralf Peter Brinkmann 2021 Plasma Sources Sci. Technol. in press https://doi.org/10.1088/1361-6595/ac0487

  Presenters

  • Liang Xu

    • Ruhr Univ Bochum

  Authors

  • Liang Xu

    • Ruhr Univ Bochum

  • Denis Eremin

    • Ruhr Univ Bochum

  • Ralf Peter Brinkmann

    • Ruhr Univ Bochum
    • Ruhr University Bochum

  View abstract →