Capacitively Coupled Plasmas II

Presentations

• Student Excellence Award Finalist: Collisional electron momentum loss in low temperature plasmas: On the validity of the classical approximation

  ORAL

  Oct. 6, 2021, 2:00 PM – Oct. 6, 2021, 2:15 PM

  Publication: Vass M, Wilczek S, Lafleur T, Brinkmann R P, Donkó Z & Schulze J 2021 "Collisional electron momentum loss in low temperature plasmas: On the validity of the classical approximation" Plasma Sources Sci. Technol., accepted maunsript

  Presenters

  • Mate Vass

    • Ruhr University Bochum, Wigner Research Centre for Physics
    • Ruhr University Bochum & Wigner Research Centre for Physics

  Authors

  • Mate Vass

    • Ruhr University Bochum, Wigner Research Centre for Physics
    • Ruhr University Bochum & Wigner Research Centre for Physics

  • Sebastian Wilczek

    • Ruhr University Bochum
    • Ruhr-University Bochum, Germany
    • Ruhr University, Bochum, Germany

  • Trevor Lafleur

    • ThrustMe
    • PlasmaPotential--Physics Consulting and Research

  • Ralf Peter Brinkmann

    • Ruhr Univ Bochum
    • Ruhr University Bochum

  • Zoltan Donko

    • Institute for Solid State Physics and Optics, Wigner Research Center for Physics, Hungary
    • Wigner Research Center for Physics
    • Wigner Research Centre for Physics
    • Wigner Research Center

  • Julian Schulze

    • University of Bochum, Germany
    • Ruhr-Universität Bochum, Germany
    • Ruhr Univ Bochum
    • Bochum University
    • Ruhr University Bochum & Dalian University of Technology
    • Ruhr University Bochum, 44780 Bochum, Germany
    • Ruhr University Bochum
    • Ruhr University Bochum and Dalian University of Technology
    • Ruhr-University Bochum, Germany; Dalian University of Technology, China

  View abstract →

• Study of plasma characteristics in capacitive discharges operated at very low pressure and in kV range triggered by very high radio-frequency

  ORAL

  Oct. 6, 2021, 2:15 PM – Oct. 6, 2021, 2:30 PM

  Presenters

  • Sarveshwar Sharma

    • Institute for Plasma Research, Bhat, Gandhinagar, Gujarat, India -382428

  Authors

  • Sarveshwar Sharma

    • Institute for Plasma Research, Bhat, Gandhinagar, Gujarat, India -382428

  • Igor Kaganovich

    • Princeton Plasma Physics Laboratory

  • Alexander V Khrabrov

    • Princeton Plasma Physics Laboratory

  View abstract →

• The effect of secondary electrons in low-pressure capacitively coupled oxygen plasmas

  ORAL

  Oct. 6, 2021, 2:30 PM – Oct. 6, 2021, 2:45 PM

  Publication: I am working on a manuscript in which I plan to publish the results to be introduced in the talk.

  Presenters

  • Benedek Horvath

    • Wigner Research Center for Physics

  Authors

  • Benedek Horvath

    • Wigner Research Center for Physics

  • Zoltan Donko

    • Institute for Solid State Physics and Optics, Wigner Research Center for Physics, Hungary
    • Wigner Research Center for Physics
    • Wigner Research Centre for Physics
    • Wigner Research Center

  • Julian Schulze

    • University of Bochum, Germany
    • Ruhr-Universität Bochum, Germany
    • Ruhr Univ Bochum
    • Bochum University
    • Ruhr University Bochum & Dalian University of Technology
    • Ruhr University Bochum, 44780 Bochum, Germany
    • Ruhr University Bochum
    • Ruhr University Bochum and Dalian University of Technology
    • Ruhr-University Bochum, Germany; Dalian University of Technology, China

  • Aranka Derzsi

    • Wigner Research Centre for Physics, Hungary
    • Wigner Research Centre for Physics, Hung

  View abstract →

• The effect of a negative direct-current voltage on striated structures and electrical parameters in a capacitively coupled rf discharge in CF₄

  ORAL

  Oct. 6, 2021, 2:45 PM – Oct. 6, 2021, 3:00 PM

  Presenters

  • Xiao-Kun Wang

    • Dalian University of Technology

  Authors

  • Xiao-Kun Wang

    • Dalian University of Technology

  • Yong-Xin Liu

    • Dalian University of Technology

  • Quan-Zhi Zhang

    • Dalian University of Technology

  • You-Nian Wang

    • School of Physics, Dalian University of Technology, Dalian 116024, People's Republic of China
    • Dalian University of Technology

  View abstract →

• Two-Dimensional Particle in Cell Simulation of Dual Frequency Effect in a Torrregime Capacitively Coupled Plasma

  ORAL

  Oct. 6, 2021, 3:00 PM – Oct. 6, 2021, 3:15 PM

  Publication: https://doi.org/10.1088/1361-6595/ac0a4c

  Presenters

  • Chang Ho Kim

    • Department of Electrical Engineering, Pusan National University
    • Pusan National University

  Authors

  • Chang Ho Kim

    • Department of Electrical Engineering, Pusan National University
    • Pusan National University

  • Hwan Ho Kim

    • Department of Electrical Engineering, Pusan National University
    • Pusan National University

  • Ji Hyun Shin

    • Department of Electrical Engineering, Pusan National University

  • Seo I Choi

    • Department of Electrical Engineering, Pusan National University

  View abstract →