Inductively Coupled Plasmas

Presentations

• E-H Transitions in Ar/O₂ and Ar/Cl₂ Inductively Coupled Plasmas for Varying Antenna Aspect Ratio - Modeling

  ORAL

  Oct. 6, 2021, 8:00 AM – Oct. 6, 2021, 8:15 AM

  Presenters

  • Tugba Piskin

    • University of Michigan

  Authors

  • Tugba Piskin

    • University of Michigan

  • Yuchen Qian

    • University of California at Los Angeles
    • California State University, Los Angeles
    • University of California, Los Angeles

  • Patrick Pribyl

    • University of California at Los Angeles
    • University of California, Los Angeles

  • Walter N Gekelman

    • University of California at Los Angeles
    • University of California, Los Angeles

  • Mark J Kushner

    • University of Michigan
    • University of Michigan, Ann Arbor
    • Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Ave, Ann Arbor, MI 48109-2122, United States of America

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• Volumetric Measurements of Electric and Magnetic Field, Current, Power deposition profiles in Ar/O₂ Inductively Coupled Plasmas*

  ORAL

  Oct. 6, 2021, 8:15 AM – Oct. 6, 2021, 8:30 AM

  Presenters

  • Yuchen Qian

    • University of California at Los Angeles
    • California State University, Los Angeles
    • University of California, Los Angeles

  Authors

  • Walter N Gekelman

    • University of California at Los Angeles
    • University of California, Los Angeles

  • Patrick Pribyl

    • University of California at Los Angeles
    • University of California, Los Angeles

  • Yuchen Qian

    • University of California at Los Angeles
    • California State University, Los Angeles
    • University of California, Los Angeles

  • Alex Paterson

    • Lam Research Corp.
    • Lam Research Corp

  • Mark J Kushner

    • University of Michigan
    • University of Michigan, Ann Arbor
    • Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Ave, Ann Arbor, MI 48109-2122, United States of America

  • Tugba Piskin

    • University of Michigan

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• Transient magneto-hydrodynamic modeling of inductively coupled plasma discharges

  ORAL

  Oct. 6, 2021, 8:30 AM – Oct. 6, 2021, 8:45 AM

  Publication: S. Kumar, A.Munafo, M. Panesi, "Computational study of hydro-dynamic phenomena in inductively-
  coupled plasmas", AIAA SciTech Forum, Jan 11-15 & Jan 19-21, 2021 (Oral presentation only)

  Presenters

  • Sanjeev Kumar

    • University of Illinois at Urbana-Champaign

  Authors

  • Sanjeev Kumar

    • University of Illinois at Urbana-Champaign

  • Alessandro Munafo

    • University of Illinois at Urbana-Champaign

  • Nagi N Mansour

    • Computational Physics, LLC
    • University of Illinois at Urbana-Champaign

  • Marco Panesi

    • University of Illinois at Urbana-Champaign

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• Incorporating Electronegative Feedback Mechanisms in a Global Plasma Circuit Model for Pulsed Power Delivery

  ORAL

  Oct. 6, 2021, 8:45 AM – Oct. 6, 2021, 9:00 AM

  Presenters

  • Carl L Smith

    • North Carolina State University

  Authors

  • Carl L Smith

    • North Carolina State University

  • Sang Ki Nam

    • Samsung Electronics
    • Samsung Mechatronics R&D center
    • Samsung Mechatronics R&D Center
    • Samsung Electronics Co.

  • Hoki Lee

    • Samsung Mechatronics R&D center
    • Samsung Mechatronics R&D Center

  • Jang-Yeob Lee

    • Samsung Mechatronics R&D Center

  • Steven Shannon

    • North Carolina State University

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• Negative hydrogen ion sources for the neutral beam systems at ITER

  ORAL · Invited

  Oct. 6, 2021, 9:00 AM – Oct. 6, 2021, 9:30 AM

  Presenters

  • Ursel E Fantz

    • Max Planck Institute for Plasma Physics

  Authors

  • Ursel E Fantz

    • Max Planck Institute for Plasma Physics

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