Energy efficiency of voltage waveform tailoring for the generation of helium metastable species in RF plasma jets
ORAL
Abstract
Atmospheric pressure capacitively coupled radio frequency discharges operated in He/N2 mixtures and driven by single frequency as well as tailored voltage waveforms are investigated using a reference microplasma COST-jet. For each case, the dissipated power is measured based on a careful calibration procedure of voltage and current measurements. The results are compared to PIC/MCC simulation results and a very good agreement is found. We demonstrate that Voltage Waveform Tailoring (VWT) - in contrast to the classical single-frequency operation - does not only provide better control of the generation of metastable species (He-I 23S1) but also provides significantly better energy efficiency of such processes.
*This work is supported by the DFG via SFB 1316 (A4), by the Hungarian NKFIH K-134462 grant, and by the Chinese NSFC grant No. 2020101005
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Presenters
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Ihor Korolov
- Ruhr Univ Bochum
- Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany
- Ruhr-Universität Bochum, Germany
- Ruhr University Bochum
- Bochum University
- Ruhr Univ Bochum, Germany
- Ruhr-University Bochum
- Ruhr-University Bochum, Germany