Electron density reduction in magnetized capacitively coupled plasmas induced by magnetic damping of the plasma series resonance

POSTER

Abstract

The effects of a homogeneous transversal magnetic field on the plasma density and electron dynamics in low pressure capacitively coupled plasmas (CCP) are studied by Particle-in-Cell/Monte Carlo collision (PIC/MCC) simulations. The plasma density increases monotonously as a function of the magnetic field at low frequencies due to the enhanced magnetic confinement of electrons. In contrast with this, a strong initial decrease is observed at higher frequencies (60 MHz) and low magnetic fields, which is caused by a magnetic damping of the self-excited Plasma Series Resonance (PSR) oscillations of the RF current and the attenuation of the corresponding Non-Linear Electron Resonance Heating (NERH). By further enhancing the magnetic field, the plasma density increases due to magnetically induced electric field reversals during sheath collapse and an enhanced interaction time of electrons with the expanding sheath edge.

*German Research Foundation (417888799), Hungarian grants NKFIH K-119357, K-134462, National Natural Science Foundation of China (12020101005, 11975067) and China Scholarship Council.

Presenters

  • Li Wang

    • Ruhr University Bochum & Dalian University of Technology
    • Ruhr University Bochum and Dalian University of Technology

Authors

  • Li Wang

    • Ruhr University Bochum & Dalian University of Technology
    • Ruhr University Bochum and Dalian University of Technology

  • Mate Vass

    • Ruhr University Bochum, Wigner Research Centre for Physics
    • Ruhr University Bochum & Wigner Research Centre for Physics

  • Zoltan Donko

    • Institute for Solid State Physics and Optics, Wigner Research Center for Physics, Hungary
    • Wigner Research Center for Physics
    • Wigner Research Centre for Physics
    • Wigner Research Center

  • Peter Hartmann

    • Wigner Research Center for Physics & Baylor University
    • Wigner Research Center for Physics, Budapest, Hungary
    • Wigner Research Center for Physics and Baylor University
    • Wigner Research Center for Physics

  • Aranka Derzsi

    • Wigner Research Centre for Physics, Hungary
    • Wigner Research Centre for Physics, Hung

  • Yuan-Hong Song

    • Dalian University of Technology

  • Julian Schulze

    • University of Bochum, Germany
    • Ruhr-Universität Bochum, Germany
    • Ruhr Univ Bochum
    • Bochum University
    • Ruhr University Bochum & Dalian University of Technology
    • Ruhr University Bochum, 44780 Bochum, Germany
    • Ruhr University Bochum
    • Ruhr University Bochum and Dalian University of Technology
    • Ruhr-University Bochum, Germany; Dalian University of Technology, China