A study on the self-consistent step-wise global model: chamber geometry effect

POSTER

Abstract

The global model based on the fluid approximation is a one of the efficient methods to understand the plasma parameters, such as electron temperature, excited densities, and plasma density, etc. In this study, we investigated the chamber geometry effect on the plasma parameters in argon inductively coupled plasmas using a self-consistent step-wise global model. External factors such as power, pressure, and chamber dimensions have been shown to significantly influence changes in plasma parameters and discharge characteristics.

*This research was supported by the Material Innovation Program (Grant No. 2020M3H4A3106004), the R&D Convergence Program (Grant No. CAP- 17–02-NFRI-01/CRC-20–01-NFRI) and the Korea Research Institute of Standards and Science (Grant No. KRISS GP2020–0009-03).

Presenters

  • Jae Wang Ban

    • Korea Research Institute of Standard and Science

Authors

  • Jae Wang Ban

    • Korea Research Institute of Standard and Science

  • Hee Jung Yeom

    • Korea Research Institute of Standards and Science (KRISS)
    • Korea Research Institute of Standard and Science

  • Deuk-Chul Kwon

    • Korea institute of Fusion Energy (KFE)
    • Korea Institute of Fusion Energy

  • Jung Hyung Kim

    • Korea Research Institute of Standards and Science
    • Korea Research Institute of Standard and Science (KRISS)
    • Korea Research Institute of Standards and Science (KRISS)
    • Korea Research Institute of Standard and Science

  • Shin Jae You

    • Chungnam Natl Univ
    • Department of Physics, Chungnam National University

  • Hyo-Chang Lee

    • Korea Research Institute of Standards and Science
    • Korea Research Institute of Standards and Science (KRISS)
    • Korea Research Inst of Standards and Sci