Plasma-surface Interactions I

Presentations

• Multiscale simulation on plasma-surface interaction: mitigation of leakage current at high-k metal oxide interface

  ORAL

  Oct. 5, 2021, 3:45 PM – Oct. 5, 2021, 4:00 PM

  Presenters

  • Byungjo Kim

    • Samsung Electronics Co.

  Authors

  • Byungjo Kim

    • Samsung Electronics Co.

  • Muyoung Kim

    • Samsung Electronics Co.

  • Suyoung Yoo

    • Samsung Electronics Co.

  • Sang Ki Nam

    • Samsung Electronics
    • Samsung Mechatronics R&D center
    • Samsung Mechatronics R&D Center
    • Samsung Electronics Co.

  View abstract →

• Ion-induced secondary electron emission coefficient of metal surfaces analysed in an ion beam experiment

  ORAL

  Oct. 5, 2021, 4:00 PM – Oct. 5, 2021, 4:15 PM

  Presenters

  • Rahel Buschhaus

    • Experimental Physics II, Bochum

  Authors

  • Rahel Buschhaus

    • Experimental Physics II, Bochum

  • Achim von Keudell

    • Ruhr-University Bochum
    • Experimental Physics II, Bochum

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• Study of plasma-surface interactions of CO2-CH4 plasma on CeO2 using in situ Infrared Transmission experiments

  ORAL

  Oct. 5, 2021, 4:15 PM – Oct. 5, 2021, 4:30 PM

  Publication: N/A

  Presenters

  • Carolina A Garcia Soto

    • Laboratoire de Physique des Plasmas, Ecole Polytechnique

  Authors

  • Carolina A Garcia Soto

    • Laboratoire de Physique des Plasmas, Ecole Polytechnique

  • Edmond Baratte

    • Laboratoire de Physique des Plasmas (LPP), CNRS, Sorbonne Université, Ecole Polytechnique Institut Polytechnique de Paris, 91128 Palaiseau France
    • Laboratoire de Physique des Plasmas, Ecole Polytechnique
    • Laboratoire de Physique des Plasmas (UMR 7648), CNRS, Univ. Paris Saclay, Sorbonne Université, École Polytechnique, France

  • Vasile I Parvulescu

    • University of Bucharest

  • Olivier Guaitella

    • Laboratoire de Physique des Plasmas (LPP), CNRS, Sorbonne Université, Ecole Polytechnique Institut Polytechnique de Paris, 91128 Palaiseau France
    • Laboratory of Plasma Physics, École Polytechnique
    • Laboratoire de Physique des Plasmas
    • Laboratoire de Physique des Plasmas, Ecole Polytechnique
    • Laboratoire de Physique des Plasmas (UMR 7648), CNRS, Univ. Paris Saclay, Sorbonne Université, École Polytechnique, France

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• Plasma Diagnostics on an Atmospheric Pressure DC Microplasma Discharge Intended for in situ TEM Integration

  ORAL

  Oct. 5, 2021, 4:30 PM – Oct. 5, 2021, 4:45 PM

  Presenters

  • Luka Hansen

    • Institute of Experimental and Applied Physics, Kiel University, Germany

  Authors

  • Luka Hansen

    • Institute of Experimental and Applied Physics, Kiel University, Germany

  • Niklas Kohlmann

    • Institute of Materials Science, Kiel University, Germany

  • Ulrich Schürmann

    • Institute of Materials Science, Kiel University, Germany

  • Lorenz Kienle

    • Institute of Materials Science, Kiel University, Germany

  • Holger Kersten

    • Institute of Experimental and Applied Physics, Kiel University, Germany

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• From the role of Ar ions in the sputter deposition of Al films to a comprehensive surface surrogate model

  ORAL

  Oct. 5, 2021, 4:45 PM – Oct. 5, 2021, 5:00 PM

  Publication: T. Gergs, T. Mussenbrock, and J. Trieschmann, A Molecular Dynamics Study on the Role of Ar Ions in the Sputter Deposition of Al Thin Films, in preparation.
  
  T. Gergs, and J. Trieschmann, A comprehensive surface surrogate model for sputtering processes based on conditional variational autoencoder, in preparation.

  Presenters

  • Tobias Gergs

    • Ruhr University Bochum

  Authors

  • Tobias Gergs

    • Ruhr University Bochum

  • Thomas Mussenbrock

    • Ruhr University Bochum
    • Bochum University
    • Ruhr Univ Bochum
    • Ruhr-University Bochum, Germany
    • Ruhr-University Bochum
    • Ruhr University Bochum, 44780 Bochum, Germany
    • Ruhr University, Bochum, Germany

  • Jan Trieschmann

    • Brandenburg University of Technology

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