Capacitively Coupled Plasmas I

Presentations

• Ion Energy and Density Profile Control by Focus Ring and Associated External Circuit on Capacitively Coupled Plasma

  ORAL

  Oct. 5, 2021, 10:15 AM – Oct. 5, 2021, 10:30 AM

  Presenters

  • Yuhua Xiao

    • North Carolina State University

  Authors

  • Yuhua Xiao

    • North Carolina State University

  • Joel Brandon

    • North Carolina State University

  • Sang Ki Nam

    • Samsung Electronics
    • Samsung Mechatronics R&D center
    • Samsung Mechatronics R&D Center
    • Samsung Electronics Co.

  • Kiho Bae

    • Samsung Mechatronics R&D Center

  • Jang-Yeob Lee

    • Samsung Mechatronics R&D Center

  • Steven Shannon

    • North Carolina State University

  View abstract →

• Frequency effects on nonlinear harmonic excitations in an asymmetrically-driven capacitive discharge

  ORAL

  Oct. 5, 2021, 10:30 AM – Oct. 5, 2021, 10:45 AM

  Presenters

  • Jian-Kai Liu

    • Dalian University of Technology; University of California, Berkeley

  Authors

  • Jian-Kai Liu

    • Dalian University of Technology; University of California, Berkeley

  • Emi Kawamura

    • University of California, Berkeley

  • Michael A Lieberman

    • University of California, Berkeley

  • Allan J Lichtenberg

    • University of California, Berkeley

  • You-Nian Wang

    • School of Physics, Dalian University of Technology, Dalian 116024, People's Republic of China
    • Dalian University of Technology

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• On the Similarity and Scaling Laws in Low-Pressure Capacitive Radio Frequency Discharges

  ORAL

  Oct. 5, 2021, 10:45 AM – Oct. 5, 2021, 11:00 AM

  Publication: [1]. Yangyang Fu, Bocong Zheng*, De-Qi Wen, Peng Zhang, Qi Hua Fan, and John P. Verboncoeur, "Similarity law and frequency scaling in low-pressure capacitive radio frequency plasmas", Appl. Phys. Lett. 117, 204101 (2020).
  [2]. Yangyang Fu, Bocong Zheng, Peng Zhang, Qi Hua Fan, John P. Verboncoeur, and Xinxin Wang, "Similarity of capacitive radio frequency discharges in nonlocal regimes", Phys. Plasmas 27, 113501 (2020).
  [3]. Yangyang Fu, Bocong Zheng, De-Qi Wen, Peng Zhang, Qi Hua Fan, and John P. Verboncoeur, "High-energy ballistic electrons in low-pressure radio-frequency plasmas", Plasma Sources Sci. Technol. 29, 09LT01 (2020).

  Presenters

  • Yangyang Fu

    • Tsinghua University

  Authors

  • Yangyang Fu

    • Tsinghua University

  • Bocong Zheng

    • Fraunhofer USA
    • Fruahnhofer Institute
    • Michigan State University

  • Huihui Wang

    • Tsinghua University

  • Peng Zhang

    • Michigan State University

  • Qi Hua Fan

    • Michigan State University

  • Xinxin Wang

    • Tsinghua University

  • John P. Verboncoeur

    • Michigan State University

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• 2D PIC simulations of geometrically asymmetric capacitive RF plasmas driven by tailored voltage waveforms

  ORAL · Invited

  Oct. 5, 2021, 11:00 AM – Oct. 5, 2021, 11:30 AM

  Publication: Li Wang et al 2021 Plasma Sources Sci. Technol. 30 054001

  Presenters

  • Li Wang

    • Ruhr University Bochum & Dalian University of Technology
    • Ruhr University Bochum and Dalian University of Technology

  Authors

  • Li Wang

    • Ruhr University Bochum & Dalian University of Technology
    • Ruhr University Bochum and Dalian University of Technology

  • Peter Hartmann

    • Wigner Research Center for Physics & Baylor University
    • Wigner Research Center for Physics, Budapest, Hungary
    • Wigner Research Center for Physics and Baylor University
    • Wigner Research Center for Physics

  • Zoltan Donko

    • Institute for Solid State Physics and Optics, Wigner Research Center for Physics, Hungary
    • Wigner Research Center for Physics
    • Wigner Research Centre for Physics
    • Wigner Research Center

  • Yuan-Hong Song

    • Dalian University of Technology

  • Julian Schulze

    • University of Bochum, Germany
    • Ruhr-Universität Bochum, Germany
    • Ruhr Univ Bochum
    • Bochum University
    • Ruhr University Bochum & Dalian University of Technology
    • Ruhr University Bochum, 44780 Bochum, Germany
    • Ruhr University Bochum
    • Ruhr University Bochum and Dalian University of Technology
    • Ruhr-University Bochum, Germany; Dalian University of Technology, China

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• Tuning the Ion Energy Distribution by Tailored Low-frequency Voltage Waveforms in CCPs

  ORAL

  Oct. 5, 2021, 11:30 AM – Oct. 5, 2021, 11:45 AM

  Presenters

  • Peter Hartmann

    • Wigner Research Center for Physics & Baylor University
    • Wigner Research Center for Physics, Budapest, Hungary
    • Wigner Research Center for Physics and Baylor University
    • Wigner Research Center for Physics

  Authors

  • Peter Hartmann

    • Wigner Research Center for Physics & Baylor University
    • Wigner Research Center for Physics, Budapest, Hungary
    • Wigner Research Center for Physics and Baylor University
    • Wigner Research Center for Physics

  • Ihor Korolov

    • Ruhr Univ Bochum
    • Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany
    • Ruhr-Universität Bochum, Germany
    • Ruhr University Bochum
    • Bochum University
    • Ruhr Univ Bochum, Germany
    • Ruhr-University Bochum
    • Ruhr-University Bochum, Germany

  • Julian Schulze

    • Ruhr University Bochum
    • Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany
    • Ruhr Univ Bochum
    • Ruhr-University Bochum, Germany; Dalian University of Technology, China
    • Ruhr University Bochum, Dalian University of Technology
    • Ruch Univ Bochum, Germany
    • Ruhr-University Bochum

  • Wouter van Gennip

    • Prodrive Technologies, Eindhoven, The Netherlands

  • Koen Buskes

    • Prodrive Technologies, Eindhoven, The Netherlands

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• The effects of surface processes on the plasma parameters in low-pressure multi-frequency capacitive discharges

  ORAL

  Oct. 5, 2021, 11:45 AM – Oct. 5, 2021, 12:00 PM

  Presenters

  • Aranka Derzsi

    • Wigner Research Centre for Physics, Hungary
    • Wigner Research Centre for Physics, Hung

  Authors

  • Aranka Derzsi

    • Wigner Research Centre for Physics, Hungary
    • Wigner Research Centre for Physics, Hung

  • Benedek Horvath

    • Wigner Research Center for Physics

  • Zoltan Donko

    • Institute for Solid State Physics and Optics, Wigner Research Center for Physics, Hungary
    • Wigner Research Center for Physics
    • Wigner Research Centre for Physics
    • Wigner Research Center

  • Julian Schulze

    • Ruhr University Bochum
    • Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany
    • Ruhr Univ Bochum
    • Ruhr-University Bochum, Germany; Dalian University of Technology, China
    • Ruhr University Bochum, Dalian University of Technology
    • Ruch Univ Bochum, Germany
    • Ruhr-University Bochum

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• Structural and Electrical Methods for Enhancing Homogeneity in Intermediate Pressure Capacitively Coupled Plasma Processing Sources

  ORAL

  Oct. 5, 2021, 12:00 PM – Oct. 5, 2021, 12:15 PM

  Presenters

  • Scott J Doyle

    • Department of Atomic, Molecular and Nuclear Physics, University of Seville, Avda. Reina Mercedes, E-41012 Seville, Spain
    • Universidad de Sevilla

  Authors

  • Scott J Doyle

    • Department of Atomic, Molecular and Nuclear Physics, University of Seville, Avda. Reina Mercedes, E-41012 Seville, Spain
    • Universidad de Sevilla

  • Gregory J Smith

    • York Plasma Institute, Department of Physics, University of York, Heslington, York, YO10 5DD, UK
    • University of York

  • Gregory Daly

    • Oxford Instruments Plasma Technology

  • Geoff Hassall

    • Oxford Instruments Plasma Technology

  • James P Dedrick

    • York Plasma Institute, Department of Physics, University of York, Heslington, York, YO10 5DD, UK
    • University of York

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• Electron power absorption in radio frequency driven capacitively coupled chlorine discharge

  ORAL

  Oct. 5, 2021, 12:15 PM – Oct. 5, 2021, 12:30 PM

  Publication: [1] A Proto and J T Gudmundsson, Plasma Sources Sci. Technol. 30 (2021) 065009
  [2] G A Skarphedinsson1 and J T Gudmundsson, Plasma Sources Sci. Technol. 29 (2020) 084004

  Presenters

  • Jon T Gudmundsson

    • Science Institute, University of Iceland, Reykjavik, Iceland
    • Univ of Iceland

  Authors

  • Jon T Gudmundsson

    • Science Institute, University of Iceland, Reykjavik, Iceland
    • Univ of Iceland

  • Andrea Proto

    • University of Iceland

  • Gardar A Skarphedinsson

    • University of Iceland

  View abstract →