Modeling Verification and Validation

Presentations

• Validation of Hybrid Electron Particle-In-Cell (PIC)-Ion Fluid Plasma Simulation Methodology for Low Pressure Capacitively Coupled Plasma (CCP) Chambers

  ORAL

  Oct. 5, 2021, 8:00 AM – Oct. 5, 2021, 8:15 AM

  Presenters

  • Sathya S Ganta

    • Applied Materials Inc

  Authors

  • Sathya S Ganta

    • Applied Materials Inc

  • Shahid Rauf

    • Applied Materials, Inc
    • Applied Materials
    • Applied Materials Inc

  • Peng Tian

    • Applied Materials Inc

  • Kallol Bera

    • Applied Materials Inc.
    • Applied Materials Inc

  • Manuel Schröder

    • Ruhr-University Bochum

  • Ihor Korolov

    • Ruhr Univ Bochum
    • Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany
    • Ruhr-Universität Bochum, Germany
    • Ruhr University Bochum
    • Bochum University
    • Ruhr Univ Bochum, Germany
    • Ruhr-University Bochum
    • Ruhr-University Bochum, Germany

  • Julian Schulze

    • Ruhr University Bochum
    • Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany
    • Ruhr Univ Bochum
    • Ruhr-University Bochum, Germany; Dalian University of Technology, China
    • Ruhr University Bochum, Dalian University of Technology
    • Ruch Univ Bochum, Germany
    • Ruhr-University Bochum

  View abstract →

• Validation and Verification Methods for the Open Source Code: Zapdos

  ORAL

  Oct. 5, 2021, 8:15 AM – Oct. 5, 2021, 8:30 AM

  Presenters

  • Corey S DeChant

    • North Carolina State University

  Authors

  • Corey S DeChant

    • North Carolina State University

  • Casey T Icenhour

    • North Carolina State University

  • Grayson Gall

    • North Carolina State University

  • Shane Keniley

    • University of Illinois at Urbana-Champai
    • University of Illinois at Urbana-Champaign

  • Alexander D Lindsay

    • Idaho National Laboratory

  • Davide Curreli

    • Univ of Illinois - Urbana
    • University of Illinois at Urbana-Champaign
    • University of Illinois

  • Steven Shannon

    • North Carolina State University

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• Particle-in-cell modeling and experimental diagnosis of dual-frequency capacitively-coupled oxygen discharge

  ORAL

  Oct. 5, 2021, 8:30 AM – Oct. 5, 2021, 8:45 AM

  Presenters

  • Han Luo

    • Applied Materials Inc

  Authors

  • Han Luo

    • Applied Materials Inc

  • Peng Tian

    • Applied Materials Inc

  • Jason Kenney

    • Applied Materials
    • Applied Materials Inc

  • Shahid Rauf

    • Applied Materials Inc

  • Julian Schulze

    • University of Bochum, Germany
    • Ruhr-Universität Bochum, Germany
    • Ruhr Univ Bochum
    • Bochum University
    • Ruhr University Bochum & Dalian University of Technology
    • Ruhr University Bochum, 44780 Bochum, Germany
    • Ruhr University Bochum
    • Ruhr University Bochum and Dalian University of Technology
    • Ruhr-University Bochum, Germany; Dalian University of Technology, China

  • Ihor Korolov

    • Ruhr Univ Bochum
    • Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany
    • Ruhr-Universität Bochum, Germany
    • Ruhr University Bochum
    • Bochum University
    • Ruhr Univ Bochum, Germany
    • Ruhr-University Bochum
    • Ruhr-University Bochum, Germany

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• Analytical model for estimating plasma parameters in a planar diode

  ORAL

  Oct. 5, 2021, 8:45 AM – Oct. 5, 2021, 9:00 AM

  Presenters

  • Haomin Sun

    • Princeton University

  Authors

  • Haomin Sun

    • Princeton University

  • Jian Chen

    • Princeton Plasma Physics Laboratory

  • Alexander V Khrabrov

    • Princeton Plasma Physics Laboratory

  • Igor Kaganovich

    • Princeton Plasma Physics Laboratory

  • David Smith

    • GE Research
    • GE GRC
    • General Electric Global Research Center
    • General Electric Global Research, Niskayuna, New York 12309, USA

  • Svetlana Selezneva

    • General Electric Global Research, Niskayuna, New York 12309, USA

  • Dmytro Sydorenko

    • University of Alberta
    • University of Alberta, Edmonton, Alberta T6G 2E1, Canada

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• Effect of dynamic particle reweighting on plasma swarm parameters in the particle-in-cell code Aleph

  ORAL

  Oct. 5, 2021, 9:00 AM – Oct. 5, 2021, 9:15 AM

  Presenters

  • Taylor H Hall

    • Sandia National Lab

  Authors

  • Taylor H Hall

    • Sandia National Lab

  • Jeremiah Boerner

    • Sandia National Laboratories

  • Zakari Eckert

    • Sandia National Laboratories

  • Russell Hooper

    • Sandia National Laboratories

  • Jose Pacheco

    • Sandia National Laboratories

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• Particle-In-Cell Modeling of Capacitively Coupled Argon Discharges in a Wide Range of Frequencies

  ORAL

  Oct. 5, 2021, 9:15 AM – Oct. 5, 2021, 9:30 AM

  Presenters

  • Saurabh H Simha

    • Purdue University

  Authors

  • Saurabh H Simha

    • Purdue University

  • Sergey Macheret

    • Purdue University

  • Jonathan Poggie

    • Purdue University

  • Igor Kaganovich

    • Princeton Plasma Physics Laboratory

  • Alexander V Khrabrov

    • Princeton Plasma Physics Laboratory

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• 2D simulation of the positive streamer in SF₆: effect of high attachment rate in atmospheric and sub atmospheric pressures.

  ORAL

  Oct. 5, 2021, 9:30 AM – Oct. 5, 2021, 9:45 AM

  Publication: Modelling of positive streamers in SF6 gas under non-uniform electric field conditions: Effect of electronegativity on streamer discharges. (Planned)

  Presenters

  • Francis Boakye-Mensah

    • Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031 France
    • Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France

  Authors

  • Francis Boakye-Mensah

    • Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031 France
    • Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France

  • Nelly Bonifaci

    • Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031 France
    • GE2lab, UMR 5269 CNRS / Grenoble INP / Université Grenoble Alpes
    • Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France

  • Rachelle Hanna

    • Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031 France
    • Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France

  • Innocent Niyonzima

    • Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031 France
    • Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France

  • Igor Timoshkin

    • Department of Electronic and Electrical Engineering, University of Strathclyde, Glasgow G1 1XW, UK

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• Experimental Validation of Particle-in-Cell/Monte Carlo Collision simulation coupled with Collisional Radiative Model by Optical Emission Spectroscopy

  ORAL

  Oct. 5, 2021, 9:45 AM – Oct. 5, 2021, 10:00 AM

  Presenters

  • Fatima Jenina T Arellano

    • Osaka Univ

  Authors

  • Fatima Jenina T Arellano

    • Osaka Univ

  • Zoltan Donko

    • Institute for Solid State Physics and Optics, Wigner Research Center for Physics, Hungary
    • Wigner Research Center for Physics
    • Wigner Research Centre for Physics
    • Wigner Research Center

  • Peter Hartmann

    • Wigner Research Center for Physics & Baylor University
    • Wigner Research Center for Physics, Budapest, Hungary
    • Wigner Research Center for Physics and Baylor University
    • Wigner Research Center for Physics

  • Tsanko Vaskov Tsankov

    • Ruhr University Bochum

  • Uwe Czarnetzki

    • Ruhr Univ Bochum

  • Satoshi Hamaguchi

    • Osaka Univ

  View abstract →