Plasma Diagnostics: Electrical Diagnostics I

Presentations

• Modern Langmuir probe diagnostics

  ORAL · Invited

  Oct. 5, 2021, 8:00 AM – Oct. 5, 2021, 8:30 AM

  Presenters

  • Valery A Godyak

    • RF Plasma Consulting, Brookline, Massachusetts 02446, USA and The Electrical Engineering and Computer Science Department, University of Michigan, Ann Arbor, Michigan 48109,

  Authors

  • Valery A Godyak

    • RF Plasma Consulting, Brookline, Massachusetts 02446, USA and The Electrical Engineering and Computer Science Department, University of Michigan, Ann Arbor, Michigan 48109,

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• Analysis and Comparison of the Electron Temperatures and the Number Densities using a Single Langmuir Probe and Optical Emission Spectroscopic Diagnostic System

  ORAL

  Oct. 5, 2021, 8:30 AM – Oct. 5, 2021, 8:45 AM

  Presenters

  • Kirk Boehm

    • PhD Candidate, Aerospace Engineering and Mechanics, The University of Alabama, Tuscaloosa

  Authors

  • Kirk Boehm

    • PhD Candidate, Aerospace Engineering and Mechanics, The University of Alabama, Tuscaloosa

  • James D Rogers

    • The University of Alabama
    • PhD Candidate, Aerospace Engineering and Mechanics, The University of Alabama, Tuscaloosa

  • Richard Branam

    • Associate Professor, Aerospace Engineering and Mechanics, The University of Alabama, Tuscaloosa
    • The University of Alabama
    • University of Alabama

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• In-situ measurement of electron emission yield at silicon surfaces in Ar/CF₄ plasmas

  ORAL

  Oct. 5, 2021, 8:45 AM – Oct. 5, 2021, 9:00 AM

  Presenters

  • Mark Sobolewski

    • National Institute of Standards and Tech

  Authors

  • Mark Sobolewski

    • National Institute of Standards and Tech

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• Wireless Retarding Field Analyzer for Ion Energy Distribution Measurements in Plasma Processes

  ORAL

  Oct. 5, 2021, 9:00 AM – Oct. 5, 2021, 9:15 AM

  Presenters

  • David Gahan

    • Impedans Ltd

  Authors

  • David Gahan

    • Impedans Ltd

  • Paul Scullin

    • Impedans Ltd

  • James Doyle

    • Impedans Ltd

  • JJ Lennon

    • Impedans Ltd

  • Andre Lochner

    • Impedans Ltd

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• Relative calibration of a retarding field energy analyzer sensor array

  ORAL

  Oct. 5, 2021, 9:15 AM – Oct. 5, 2021, 9:30 AM

  Publication: S. Ries Rev. Sci. Instr. 2021 submitted: RSI21-AR-01316

  Presenters

  • Manuel Schröder

    • Ruhr-University Bochum, Germany

  Authors

  • Manuel Schröder

    • Ruhr-University Bochum, Germany

  • Ihor Korolov

    • Ruhr Univ Bochum
    • Institute of Electrical Engineering and Plasma Technology, Faculty of Electrical Engineering and Information Technology, Ruhr-University Bochum, Germany
    • Ruhr-Universität Bochum, Germany
    • Ruhr University Bochum
    • Bochum University
    • Ruhr Univ Bochum, Germany
    • Ruhr-University Bochum
    • Ruhr-University Bochum, Germany

  • Stefan Ries

    • Ruhr-University Bochum, Germany

  • David A. A Schulenberg

    • Ruhr-Universität Bochum, Germany
    • Ruhr-University Bochum, Germany

  • Peter Awakowicz

    • Ruhr-University Bochum
    • Ruhr University Bochum
    • Ruhr Univ Bochum
    • Ruhr-University Bochum, Germany

  • Julian Schulze

    • University of Bochum, Germany
    • Ruhr-Universität Bochum, Germany
    • Ruhr Univ Bochum
    • Bochum University
    • Ruhr University Bochum & Dalian University of Technology
    • Ruhr University Bochum, 44780 Bochum, Germany
    • Ruhr University Bochum
    • Ruhr University Bochum and Dalian University of Technology
    • Ruhr-University Bochum, Germany; Dalian University of Technology, China

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• Experimental Diagnostics for Electrons and Atoms in Low Pressure Iodine Plasmas

  ORAL

  Oct. 5, 2021, 9:30 AM – Oct. 5, 2021, 9:45 AM

  Presenters

  • Benjamin Esteves

    • Ecole Polytechnique
    • Laboratoire de Physique des Plasmas (LPP), CNRS, Sorbonne Université, École Polytechnique, Institut Polytechnique de Paris, 91120 Palaiseau, France

  Authors

  • Benjamin Esteves

    • Ecole Polytechnique
    • Laboratoire de Physique des Plasmas (LPP), CNRS, Sorbonne Université, École Polytechnique, Institut Polytechnique de Paris, 91120 Palaiseau, France

  • Anne Bourdon

    • LPP, CNRS, Sorbonne Université, Ecole Polytechnique, Institut Polytechnique de Paris, 91120 Palaiseau, France
    • LPP
    • Laboratoire de Physique des Plasmas (LPP), CNRS, Sorbonne Université, École Polytechnique, Institut Polytechnique de Paris, 91120 Palaiseau, France
    • LPP, Ecole polytechnique
    • CNRS, Laboratoire de Physique des Plasmas
    • Laboratory of Plasma Physics, École Polytechnique
    • Laboratoire de Physique des Plasmas
    • LPP, CNRS, Sorbonne Universit\'e, Ecole Polytechnique, Institut Polytechnique de Paris, 91120 Palaiseau, France

  • Alejandro Alvarez Laguna

    • LPP
    • Laboratoire de Physique des Plasmas (LPP), CNRS, Sorbonne Université, École Polytechnique, Institut Polytechnique de Paris, 91120 Palaiseau, France
    • LPP, Ecole polytechnique
    • CNRS, Laboratoire de Physique des Plasmas
    • Laboratoire de Physique des Plasmas, CNRS, E. Polytechnique

  • Pascal Chabert

    • Ecole Polytechnique
    • Ecole Polytechnique, France
    • LPP, Ecole polytechnique

  • Cyril Drag

    • Laboratoire de Physique des Plasmas (LPP), CNRS, Sorbonne Université, École Polytechnique, Institut Polytechnique de Paris, 91120 Palaiseau, France

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• Fast-Sweeping Langmuir probes: What happens to the I-V trace when sweeping frequency is higher than the ion plasma frequency?

  ORAL

  Oct. 5, 2021, 9:45 AM – Oct. 5, 2021, 10:00 AM

  Presenters

  • Chenyao Jin

    • University of Science and Technology of
    • Chinese Academy of Sciences; University of Science and Technology of China

  Authors

  • Chenyao Jin

    • University of Science and Technology of
    • Chinese Academy of Sciences; University of Science and Technology of China

  • Chi-Shung Yip

    • Chinese Academy of Sciences

  • Wei Zhang

    • Institute of Plasma Physics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China
    • Chinese Academy of Sciences

  • Di Jiang

    • Institute of Plasma Physics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China
    • Chinese Academy of Sciences

  • Guosheng Xu

    • Institute of Plasma Physics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China
    • Chinese Academy of Sciences

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