Capacitively Coupled Plasmas II

Presentations

• Electron power absorption in capacitive RF plasmas based on a moment analysis of the Boltzmann equation

  COFFEE_KLATCH · Invited

  Oct. 7, 2020, 1:00 PM – Oct. 7, 2020, 1:30 PM

  Authors

  • Mate Vass

    • Ruhr-University Bochum, Germany; Wigner Research Centre for Physics, Hungary

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• Kinetic Modeling of Low-Pressure Multi-Frequency Capacitively Coupled Plasmas

  COFFEE_KLATCH · Invited

  Oct. 7, 2020, 1:30 PM – Oct. 7, 2020, 2:00 PM

  Authors

  • Shahid Rauf

    • Applied Materials Inc

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• Fluid Modeling of Capacitively Coupled Radio-frequency Discharge Over a Wide Range of Frequencies

  ORAL

  Oct. 7, 2020, 2:00 PM – Oct. 7, 2020, 2:15 PM

  Authors

  • Han Luo

    • Purdue University

  • Andrei Khomenko

    • Purdue University

  • Sergey Macheret

    • Purdue University

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• Simulation of a capacitively coupled plasma micro-thruster using the particle-in-cell method.

  ORAL

  Oct. 7, 2020, 2:15 PM – Oct. 7, 2020, 2:30 PM

  Authors

  • Michael May

    • Princeton Plasma Physics Laboratory

  • Andrew Powis

    • Princeton Plasma Physics Laboratory

  • Igor Kaganovich

    • Princeton Plasma Physics Laboratory
    • Princeton Plasma Physics Laboratory, Princeton NJ
    • Plasma Physics Laboratory, Princeton University, Princeton, New Jersey 08543, USA
    • Princeton Plasma Physics Laboratory, USA
    • Princeton Plasma Physics Lab

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