Modeling & Simulation III

Presentations

• Kinetic modeling of Active Plasma Resonance Spectroscopy: Why ``Drude'' is not enough

  ORAL

  Oct. 31, 2019, 4:00 PM – Oct. 31, 2019, 4:15 PM

  Authors

  • Ralf Peter Brinkmann

    • Ruhr University Bochum

  • Chunjie Wang

    • Ruhr University Bochum

  • Junbo Gong

    • Ruhr University Bochum

  • Michael Friedrichs

    • Institute of Product and Process Innovation, Leuphana University of Lüneburg
    • Leuphana Universitity Lüneburg

  • Jens Oberrath

    • Institue of Product and Process Innovation, Leuphana University Lueneburg
    • Institute of Product and Process Innovation, Leuphana University of Lüneburg
    • Leuphana Universitity Lüneburg

  View abstract →

• Sheath Model Coupled Electromagnetic Simulation of Capacitively Coupled Plasma Reactors

  ORAL

  Oct. 31, 2019, 4:15 PM – Oct. 31, 2019, 4:30 PM

  Authors

  • Xiaopu Li

    • Applied Materials Inc
    • Applied Materials, Inc.

  • Kallol Bera

    • Applied Materials Inc

  • Shahid Rauf

    • Applied Materials Inc

  • Dikshitulu K. Kalluri

    • Applied Materials Inc.

  View abstract →

• Model-experiment comparison of radiofrequency phase resolved plasma parameters for moderate pressure capacitively coupled discharges

  ORAL

  Oct. 31, 2019, 4:30 PM – Oct. 31, 2019, 4:45 PM

  Authors

  • David Peterson

    • North Carolina State University

  • Kristopher Ford

    • North Carolina State University

  • Joel Brandon

    • North Carolina State University

  • Travis Koh

    • Applied Materials Inc.

  • Thai Cheng Chua

    • Applied Materials Inc.

  • Wei Tian

    • Applied Materials Inc.

  • Kallol Bera

    • Applied Materials Inc.

  • Shahid Rauf

    • Applied Materials Inc.

  • Philip A. Kraus

    • Applied Materials Inc.

  • Steven C. Shannon

    • North Carolina State University

  View abstract →

• Ideal Multipole Resonance Probe: a Spectral Kinetic Approach

  ORAL

  Oct. 31, 2019, 4:45 PM – Oct. 31, 2019, 5:00 PM

  Authors

  • Junbo Gong

    • Ruhr-University Bochum

  • Michael Friedrichs

    • Leuphana University Luneburg

  • Chunjie Wang

    • Ruhr-University Bochum

  • Sebastian Wilczek

    • Ruhr-University Bochum

  • Denis Eremin

    • Ruhr-University Bochum

  • Jens Oberrath

    • Leuphana University Luneburg

  • Ralf Peter Brinkmann

    • Ruhr-University Bochum

  View abstract →

• Control of electron, ion and neutral heating in radio-frequency hollow cathodes

  COFFEE_KLATCH · Invited

  Oct. 31, 2019, 5:00 PM – Oct. 31, 2019, 5:30 PM

  Authors

  • James Dedrick

    • University of York

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• Simulations of the real planar multipole resonance probe in electrostatic approximation

  ORAL

  Oct. 31, 2019, 5:30 PM – Oct. 31, 2019, 5:45 PM

  Authors

  • Michael Friedrichs

    • Institute of Product and Process Innovation, Leuphana University of Lüneburg
    • Leuphana Universitity Lüneburg

  • Dennis Pohle

    • Institute of Microwave Systems, Ruhr University Bochum

  • Ilona Rolfes

    • Institute of Microwave Systems, Ruhr University Bochum

  • Jens Oberrath

    • Institue of Product and Process Innovation, Leuphana University Lueneburg
    • Institute of Product and Process Innovation, Leuphana University of Lüneburg
    • Leuphana Universitity Lüneburg

  View abstract →

• Validation of the Open Source Multi-Fluid Plasma Code: Zapdos

  ORAL

  Oct. 31, 2019, 5:45 PM – Oct. 31, 2019, 6:00 PM

  Authors

  • Corey DeChant

    • North Carolina State University

  • Shane Keniley

    • University of Illinois - Urbana
    • University of Illinois at Urbana-Champaign

  • Brayden Myers

    • North Carolina State University

  • Katharina Stapelmann

    • North Carolina State University

  • Davide Curreli

    • University of Illinois - Urbana
    • Univ. of Illinois Urbana-Champaign
    • University of Illinois at Urbana-Champaign

  • Steven Shannon

    • North Carolina State University

  View abstract →

• Block matrix based LU decomposition to compute kinetic spectra of the Multipole Resonance Probe

  ORAL

  Oct. 31, 2019, 6:00 PM – Oct. 31, 2019, 6:15 PM

  Authors

  • Jens Oberrath

    • Institue of Product and Process Innovation, Leuphana University Lueneburg
    • Institute of Product and Process Innovation, Leuphana University of Lüneburg
    • Leuphana Universitity Lüneburg

  View abstract →