Plasma Surface Interactons

Presentations

• Fabrication of a Micro Secondary Electron Detection System and Its Measurement Results

  ORAL

  Oct. 30, 2019, 8:00 AM – Oct. 30, 2019, 8:15 AM

  Authors

  • Zhengyang Wang

    • Department of Electrical and Computer Engineering, the University of Texas at Dallas

  • Matthew Goeckner

    • University of Texas at Dallas
    • Department of Electrical and Computer Engineering, the University of Texas at Dallas
    • The University of Texas at Dallas

  • Lawrence Overzet

    • The University of Texas at Dallas
    • University of Texas at Dallas
    • Department of Electrical and Computer Engineering, the University of Texas at Dallas

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• In-situ measurement of electron emission and electron reflection yields

  ORAL

  Oct. 30, 2019, 8:15 AM – Oct. 30, 2019, 8:30 AM

  Authors

  • Mark Sobolewski

    • National Institute of Standards and Technology

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• Glow discharge optical spectroscopy for sputter-depth profile analysis in plasmas

  ORAL

  Oct. 30, 2019, 8:30 AM – Oct. 30, 2019, 8:45 AM

  Authors

  • Priyanka Arora

    • University of Houston

  • Junghyun Cho

    • Samsung Electronics

  • Vincent Donnelly

    • University of Houston

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• Surface production of negative ions from nitrogen doped diamond in a deuterium plasma

  ORAL

  Oct. 30, 2019, 8:45 AM – Oct. 30, 2019, 9:00 AM

  Authors

  • Gregory Smith

    • University of York, UK

  • James Ellis

    • University of York, UK

  • Roba Moussaoui

    • PIIM, Aix-Marseille University, France

  • Cedric Pardanaud

    • PIIM, Aix-Marseille University, France

  • Jocelyn Achard

    • LSPM, Universit\'e Paris 13, France

  • Riadh Issaoui

    • LSPM, Universit\'e Paris 13, France

  • Timo Gans

    • University of York, UK

  • James Dedrick

    • University of York, UK

  • Gilles Cartry

    • PIIM, Aix-Marseille University, France

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• Measurements of material induced chemistry effects on low pressure planar ICP

  ORAL

  Oct. 30, 2019, 9:00 AM – Oct. 30, 2019, 9:15 AM

  Authors

  • Joel Brandon

    • North Carolina State University

  • Sang Ki Nam

    • Samsung Electronics Mechatronics Division

  • Steven Shannon

    • North Carolina State University

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• Observation of Tungsten Blister-Generated Grain Orientation Change According to Hydrogen Ion Incident Angle

  ORAL

  Oct. 30, 2019, 9:15 AM – Oct. 30, 2019, 9:30 AM

  Authors

  • Myeong-Geon Lee

    • Department of Energy Systems (Nuclear) Engineering ,Seoul National University, Korea

  • Nam-Kyun Kim

    • Manufacturing Technology Center, Samsung Electronics

  • Ki-Baek Roh

    • Department of Energy Systems (Nuclear) Engineering ,Seoul National University, Korea

  • Gon-Ho Kim

    • Department of Energy Systems (Nuclear) Engineering ,Seoul National University, Korea

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