Capacitively Coupled Plasmas I

Presentations

• The Influence of $\gamma$- and $\delta$-Electrons on the Nonlocal Power Absorption in Capacitively Coupled Plasmas

  ORAL

  Oct. 29, 2019, 1:45 PM – Oct. 29, 2019, 2:00 PM

  Authors

  • Katharina Noesges

    • Ruhr University Bochum, Germany

  • Aranka Derzsi

    • West Virginia University
    • Wigner Research Centre for Physics, Budapest, Hungary

  • Benedek Horvath

    • Wigner Research Centre for Physics
    • Wigner Research Centre for Physics, Budapest, Hungary

  • Julian Schulze

    • Ruhr-University Bochum
    • Ruhr-University Bochum, Germany
    • 2Department of Electrical Engineering, Ruhr University Bochum, Bochum, Germany
    • Ruhr University Bochum, Germany, West Virginia University, USA
    • West Virginia University, Ruhr University Bochum
    • Ruhr University Bochum, Germany

  • Thomas Mussenbrock

    • Brandenburg University of Technology, Cottbus, Germany
    • Brandenburg University of Technology Cottbus-Senftenberg
    • University of Cottbus, Germany

  • Ralf Peter Brinkmann

    • Ruhr University Bochum, Germany

  • Sebastian Wilczek

    • Ruhr-University Bochum, Germany
    • Ruhr University Bochum, Germany

  View abstract →

• Surface processes in capacitive radio frequency discharges driven by tailored voltage waveforms

  ORAL

  Oct. 29, 2019, 2:00 PM – Oct. 29, 2019, 2:15 PM

  Authors

  • Aranka Derzsi

    • West Virginia University, Wigner Research Centre for Physics

  • Julian Schulze

    • Ruhr-University Bochum
    • Ruhr-University Bochum, Germany
    • 2Department of Electrical Engineering, Ruhr University Bochum, Bochum, Germany
    • Ruhr University Bochum, Germany, West Virginia University, USA
    • West Virginia University, Ruhr University Bochum
    • Ruhr University Bochum, Germany

  View abstract →

• Secondary electron effect on sustaining capacitively coupled discharges: A hybrid modeling investigation of the ionization rate

  ORAL

  Oct. 29, 2019, 2:15 PM – Oct. 29, 2019, 2:30 PM

  Authors

  • Ying-Ying Wen

    • Dalian University of Technology

  • Yu-Ru Zhang

    • Dalian University of Technology
    • School of Physics, Dalian University of Technology, Dalian 116024, China

  • Yuan-Hong Song

    • Dalian University of Technology

  • You-Nian Wang

    • Dalian University of Technology
    • School of Physics, Dalian University of Technology, Dalian 116024, China
    • Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics, Dalian University of Technology

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• Spatio-temporal analysis of electron power absorption in low pressure CCPs operated in O2

  ORAL

  Oct. 29, 2019, 2:30 PM – Oct. 29, 2019, 2:45 PM

  Authors

  • Mate Vass

    • Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary

  • Sebastian Wilczek

    • Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany

  • Julian Schulze

    • Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany

  • Trevor Lafleur

    • PlasmaPotential—Physics Consulting and Research, Canberra, Australia

  • Zoltan Donko

    • Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary

  • Ralf Peter Brinkmann

    • Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany

  View abstract →

• Effect of driving frequency on electron heating mechanism and plasma parameters in a symmetric capacitive discharge under constant power density condition

  ORAL

  Oct. 29, 2019, 2:45 PM – Oct. 29, 2019, 3:00 PM

  Authors

  • Nishant Sirse

    • Dublin City University, Ireland

  • Sarveshwar Sharma

    • Institute for Plasma Research, Bhat, Gandhinagar 382 428, India
    • Institute for Plasma Research, Gandhinagar, India

  • Miles Turner

    • Dublin City University, Ireland
    • Dublin City University

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• Student Excellence Award Finalist: A potential remedy for etched trench deformations based on voltage waveform tailoring and electric field reversal

  ORAL

  Oct. 29, 2019, 3:00 PM – Oct. 29, 2019, 3:15 PM

  Authors

  • Florian Krüger

    • Brandenburg University of Technology Cottbus-Senftenberg

  • Sebastian Wilczek

    • Ruhr University Bochum

  • Thomas Mussenbrock

    • Brandenburg University of Technology, Cottbus, Germany
    • Brandenburg University of Technology Cottbus-Senftenberg
    • University of Cottbus, Germany

  • Julian Schulze

    • Ruhr University Bochum

  View abstract →

• Electric field reversal and electron heating mode transition induced by magnetic field in capacitive oxygen discharges

  ORAL

  Oct. 29, 2019, 3:15 PM – Oct. 29, 2019, 3:30 PM

  Authors

  • Li Wang

    • Dalian University of Technology

  • De-Qi Wen

    • Michigan State University

  • Yuan-Hong Song

    • Dalian University of Technology

  • You-Nian Wang

    • Dalian University of Technology

  View abstract →

• Electron heating in magnetized capacitively coupled discharges

  ORAL

  Oct. 29, 2019, 3:30 PM – Oct. 29, 2019, 3:45 PM

  Authors

  • Bocong Zheng

    • Michigan State Univ

  • Thomas Schuelke

    • Michigan State Univ

  • Qi Hua Fan

    • qfan@egr.msu.edu

  View abstract →