Inductively Coupled Plasmas

Presentations

• Student Excellence Award Finalist: Transition to instability-enhanced transport in weakly-ionized magnetized plasmas

  ORAL

  Oct. 29, 2019, 8:00 AM – Oct. 29, 2019, 8:15 AM

  Authors

  • Romain Lucken

    • LPP, CNRS, Ecole Polytechnique
    • Laboratoire de Physique des Plasmas
    • Laboratoire de Physique des Plasmas, UMR CNRS 7648 École polytechnique Sorbonne Université, 91128 Palaiseau, FRANCE (LPP)

  • Antoine Tavant

    • Laboratoire de Physique des Plasmas
    • LPP, CNRS, Ecole Polytechnique and SAFRAN Aircraft Engines
    • Laboratoire de Physique des Plasmas, CNRS, Ecole polytechnique
    • LPP

  • Anne Bourdon

    • LPP, CNRS, Ecole Polytechnique
    • Laboratoire de Physique des Plasmas
    • Laboratoire de Physique des Plasmas (LPP), CNRS, Ecole polytechnique
    • Laboratoire de Physique des Plasmas, CNRS, Ecole polytechnique
    • LPP

  • Mike A. Lieberman

    • University of California, Berkeley
    • Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720

  • Pascal Chabert

    • Laboratoire de Physique des Plasmas
    • École Polytechnique
    • LPP, CNRS, Ecole Polytechnique
    • Laboratoire de Physique des Plasmas (LPP), CNRS, Ecole polytechnique
    • Laboratoire de Physique des Plasmas, CNRS, Ecole polytechnique
    • LPP

  View abstract →

• Electromagnetic approach to a novel microwave driven ICP plasma jet

  ORAL

  Oct. 29, 2019, 8:15 AM – Oct. 29, 2019, 8:30 AM

  Authors

  • Michael Klute

    • Ruhr University Bochum

  • Horia-Eugen Porteanu

    • Ferdinand Braun Institute Berlin

  • Ilija Stefanovic

    • Ruhr University Bochum

  • Nikita Bibinov

    • Ruhr University Bochum

  • Wolfgang Heinrich

    • Ferdinand Braun Institute Berlin

  • Peter Awakowicz

    • Ruhr University Bochum

  • Ralf Peter Brinkmann

    • Ruhr University Bochum

  View abstract →

• Computational Investigation of Pulsed Inductively Coupled Plasmas for STI Etching

  ORAL

  Oct. 29, 2019, 8:30 AM – Oct. 29, 2019, 8:45 AM

  Authors

  • Wei Tian

    • Applied Materials Inc

  • JC Wang

    • Applied Materials Inc

  • S Rauf

    • Applied Materials Inc

  • S Sadighi

    • Applied Materials Inc

  • J Kenney

    • Applied Materials Inc

  View abstract →

• Experimental and numerical investigations on characteristics of electron density in pulsed inductively coupled O$_{\mathrm{2}}$/Ar plasmas

  ORAL

  Oct. 29, 2019, 8:45 AM – Oct. 29, 2019, 9:00 AM

  Authors

  • Wei Liu

    • Xi'an Jiaotong University

  • Xiao-Kun Wang

    • Dalian University of Technology

  • Sha-Sha Song

    • Xi'an Jiaotong University

  • Yong-Xin Liu

    • Dalian University of Technology

  • Fei Gao

    • Dalian University of Technology

  • You-Nian Wang

    • Dalian University of Technology

  • Yong-Tao Zhao

    • Xi'an Jiaotong University

  View abstract →

• Finite skin depth consideration in the inductive transformer matrix model: implications for external circuit design and pulsed power operation

  ORAL

  Oct. 29, 2019, 9:00 AM – Oct. 29, 2019, 9:15 AM

  Authors

  • Carl Smith

    • North Carolina State University

  • Joel Brandon

    • North Carolina State University

  • Kristopher Ford

    • North Carolina State University

  • David Peterson

    • North Carolina State University

  • Steven Shannon

    • North Carolina State University

  • Sang-Ki Nam

    • Samsung Electronics

  View abstract →