Diagnostics II (Electrical)

Presentations

• Expanding the Functionality of Plasma Diagnostics

  COFFEE_KLATCH · Invited

  Nov. 9, 2018, 9:30 AM – Nov. 9, 2018, 10:00 AM

  Authors

  • Steven Shannon

    • North Carolina State University

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• Model-Experiment Comparison of Plasma Characteristics for Moderate Pressure Capacitively Coupled Discharges

  ORAL

  Nov. 9, 2018, 10:00 AM – Nov. 9, 2018, 10:15 AM

  Authors

  • David Peterson

    • Applied Materials Inc., 1140 E. Arques Avenue Sunnyvale, California 94085
    • North Carolina State University

  • Steven C. Shannon

    • North Carolina State University

  • Wei Tian

    • Applied Materials Inc., 1140 E. Arques Avenue Sunnyvale, California 94085

  • Philip A. Kraus

    • Applied Materials Inc., 1140 E. Arques Avenue Sunnyvale, California 94085

  • Kallol Bera

    • Applied Materials Inc., 1140 E. Arques Avenue Sunnyvale, California 94085

  • Shahid Rauf

    • Applied Materials Inc., 1140 E. Arques Avenue Sunnyvale, California 94085

  • Thai Cheng Chua

    • Applied Materials Inc., 1140 E. Arques Avenue Sunnyvale, California 94085

  • Travis Koh

    • Applied Materials Inc., 1140 E. Arques Avenue Sunnyvale, California 94085

  • David Peterson

    • Applied Materials Inc., 1140 E. Arques Avenue Sunnyvale, California 94085
    • North Carolina State University

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• Langmuir Probe Modifications for Use in Pulsed Plasma

  ORAL

  Nov. 9, 2018, 10:15 AM – Nov. 9, 2018, 10:30 AM

  Authors

  • Alex Press

    • The University of Texas at Dallas

  • Keith Hernandez

    • The University of Texas at Dallas

  • Matthew Goeckner

    • The University of Texas at Dallas
    • Univ of Texas, Dallas
    • University of Texas at Dallas

  • Lawrence Overzet

    • The University of Texas at Dallas
    • Univ of Texas, Dallas
    • University of Texas at Dallas

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• Probe tip length effect of cutoff probe for measurement of high density plasma based on a new circuit cutoff model

  ORAL

  Nov. 9, 2018, 10:30 AM – Nov. 9, 2018, 10:45 AM

  Authors

  • SiJun Kim

    • Applied Physics lab for PLasma Engineering (APPLE), Department of Physics, Chungnam Natl Univ

  • JangJae Lee

    • Applied Physics lab for PLasma Engineering (APPLE), Department of Physics, Chungnam Natl Univ

  • DaeWoong Kim

    • Korea Institute of Machinery and Materials (KIMM)

  • Jung-Hyung Kim

    • Korea Research Institute of Standards and Science (KRISS)

  • ShinJae You

    • Applied Physics lab for PLasma Engineering (APPLE), Department of Physics, Chungnam Natl Univ
    • Applied Physics lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University

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• The multipole resonance probe: kinetic damping in its spectra

  ORAL

  Nov. 9, 2018, 10:45 AM – Nov. 9, 2018, 11:00 AM

  Authors

  • Jens Oberrath

    • Institute of Product and Process Innovation, Leuphana University Lüneburg, Germany
    • Leuphana University Lueneburg

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• Analysis of Kinetic Dynamics of the Multipole Resonance Probe

  ORAL

  Nov. 9, 2018, 11:00 AM – Nov. 9, 2018, 11:15 AM

  Authors

  • Junbo Gong

    • Ruhr University Bochum

  • Michael Friedrichs

    • Leuphana University Lüneburg

  • Sebastian Wilczek

    • Ruhr University Bochum

  • Denis Eremin

    • Ruhr University Bochum

  • Jens Oberrath

    • Leuphana University Lüneburg

  • Ralf Peter Brinkmann

    • Ruhr University Bochum

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• Kinetic Spectra of the Planar Multipole Resonance Probe

  ORAL

  Nov. 9, 2018, 11:15 AM – Nov. 9, 2018, 11:30 AM

  Authors

  • Michael Friedrichs

    • Institute of Product and Process Innovation, Leuphana University

  • Jens Oberrath

    • Institute of Product and Process Innovation, Leuphana University Lüneburg, Germany
    • Leuphana University Lueneburg

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• Real-time plasma impedance matching using an impedance mapping strategy.

  ORAL

  Nov. 9, 2018, 11:30 AM – Nov. 9, 2018, 11:45 AM

  Authors

  • Mike Hopkins

    • Impedans Ltd

  • David Gahan

    • Impedans Ltd

  • Paul Scullin

    • Impedans Ltd

  • Thomas Gilmore

    • Impedans Ltd

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• Novel voltage-based temperature measurement method for dielectric barrier discharges

  ORAL

  Nov. 9, 2018, 11:45 AM – Nov. 9, 2018, 12:00 PM

  Authors

  • Robert Bansemer

    • Leibniz Institute for Plasma Science and Technology (INP)

  • Ansgar Schmidt-Bleker

    • Leibniz Institute for Plasma Science and Technology (INP), Greifswald, Germany

  • Ursula van Rienen

    • Institute of General Electrical Engineering, University of Rostock, Germany

  • Klaus-Dieter Weltmann

    • Leibniz Institute for Plasma Science and Technology (INP), Greifswald, Germany

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