Nonequilibrium Kinetics of Low-temperature Plasmas
ORAL · SF3 ·
Presentations
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A reliable Collisional Radiative Model for Xenon Plasma
ORAL
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Authors
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Priti Priti
- Indian Institute of Technology Roorkee, India
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Reetesh Gangwar
- Visvesvaraya National Institute of Technology Nagpur, India
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Rajesh Srivastava
- Indian Institute of Technology Roorkee, India
- Indian Institute of Technology Roorkee, Roorkee, India
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Strong Vibrational Non-Equilibrium in N$_2$ and CO$_2$ by Microsecond Pulsed Microwave Plasma
ORAL
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Authors
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Gerard Van Rooij
- Dutch Institute for Fundamental Energy Research
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Dirk van den Bekerom
- Dutch Institute for Fundamental Energy Research
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Tom Butterworth
- Dutch Institute for Fundamental Energy Research
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Teofil Minea
- Dutch Institute for Fundamental Energy Research
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Qin Ong
- Dutch Institute for Fundamental Energy Research
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Alex van de Steeg
- Dutch Institute for Fundamental Energy Research
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Richard van de Sanden
- Dutch Institute for Fundamental Energy Research
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O atom kinetics in RF CCP oxygen plasma at increased pressures
ORAL
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Authors
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Andrey Volynets
- Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Russia
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Dmitry Lopaev
- Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Russia
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Olga Proshina
- Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Russia
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Tatyana Rakhimova
- Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Russia
- Lomonosov Moscow State University, Russian Federation
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Alexander Rakhimov
- Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, Russia
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EUV emission from Sn plasmas
ORAL
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Authors
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James Colgan
- Los Alamos Natl Lab
- Los Alamos National Lab
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Joris Scheers
- Advanced Research Center for Nanolithography
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Francesco Torretti
- Advanced Research Center for Nanolithography
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Ruben Schupp
- Advanced Research Center for Nanolithography
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Amanda Neukirch
- Los Alamos Natl Lab
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David Kilcrease
- Los Alamos Natl Lab
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Joe Abdallah
- Los Alamos Natl Lab
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Manolo Sherrill
- Los Alamos Natl Lab
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Chris Fontes
- Los Alamos Natl Lab
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Peter Hakel
- Los Alamos Natl Lab
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Oscar Versolato
- Advanced Research Center for Nanolithography
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