Inductively Coupled Plasmas

Presentations

• Inductively Coupled Plasma with Ferromagnetic Core for Space Propulsion

  ORAL

  Nov. 8, 2018, 2:00 PM – Nov. 8, 2018, 2:15 PM

  Authors

  • Valery Godyak

    • RF Plasma Consulting

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• Oxygen metastable molecule densities in inductively-coupled plasmas in pure O$_{2}$ measured by VUV absorption

  ORAL

  Nov. 8, 2018, 2:15 PM – Nov. 8, 2018, 2:30 PM

  Authors

  • Jean-Paul Booth

    • LPP, Ecole Polytechnique
    • LPP-CNRS, Ecole Polytechnique, Palaiseau, France
    • Laboratoire de Physique des Plasmas (CNRS, Ecole polytechnique, Sorbonne Universite, Universite Paris-Sud, Observatoire de Paris)

  • Abhyuday Chatterjee

    • LPP-CNRS, Ecole Polytechnique, Palaiseau, France

  • Olivier Guaitella

    • LPP-CNRS, Ecole Polytechnique, Palaiseau, France
    • LPP, Ecole Polytechnique
    • Ecole Polytechnique, France
    • LPP, CNRS, Ecole Polytechnique, UPMC, Universite Paris-Saclay, 91128 Palaiseau, France

  • Nelson de Oliveira

    • Synchrotron Soleil, Gif-sur-Yvette, France
    • Synchrotron Soleil, Gif sur Yvette, France

  • Laurent Nahon

    • Synchrotron Soleil, Gif-sur-Yvette, France
    • Synchrotron Soleil, Gif sur Yvette, France

  • Colin Western

    • School of Chemistry, Bristol University, UK
    • Bristol University, UK

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• Complex Transients in Power Modulated Inductively Coupled Chlorine Plasmas

  ORAL

  Nov. 8, 2018, 2:30 PM – Nov. 8, 2018, 2:45 PM

  Authors

  • Vincent M Donnelly

    • University of Houston

  • Tyler List

    • University of Houston

  • Tianyu Ma

    • University of Houston

  • Priyanka Arora

    • University of Houston

  • Steven Shannon

    • North Carolina State University

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• Kinetic Model of Stochastic Heating in the INCA Discharge

  ORAL

  Nov. 8, 2018, 2:45 PM – Nov. 8, 2018, 3:00 PM

  Authors

  • Uwe Czarnetzki

    • Ruhr Univ Bochum

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• INCA - Inductive Discharge Array

  ORAL

  Nov. 8, 2018, 3:00 PM – Nov. 8, 2018, 3:15 PM

  Authors

  • Philipp Ahr

    • Institute for Plasma and Atomic Physics, Ruhr-University Bochum

  • Tsanko V. Tsankov

    • Institute for Plasma and Atomic Physics, Ruhr-University Bochum

  • Jan Kuhfeld

    • Institute for Plasma and Atomic Physics, Ruhr-University Bochum

  • Uwe Czarnetzki

    • Institute for Plasma and Atomic Physics, Ruhr-University Bochum

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• Multi-zone Equilibrium of ICP Discharge for Plasma Processing. Mechanism of Electron Heating

  ORAL

  Nov. 8, 2018, 3:15 PM – Nov. 8, 2018, 3:30 PM

  Authors

  • Vladimir Nagorny

    • Applied Materials Inc

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• Investigation on the radio-frequency power transfer efficiency in an inductively coupled hydrogen plasma source with an expansion region

  ORAL

  Nov. 8, 2018, 3:30 PM – Nov. 8, 2018, 3:45 PM

  Authors

  • Hong Li

    • Dalian University of Technology

  • Fei Gao

    • Dalian University of Technology

  • De-Qi Wen

    • Dalian University of Technology
    • School of Physics, Dalian University of Technology
    • Michigan State University

  • Wei Yang

    • Dalian University of Technology

  • Peng-Cheng Du

    • Dalian University of Technology

  • You-Nian Wang

    • Dalian University of Technology
    • Dalian University of Technology, China

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• Consequences of E-H transitions in Impendence Matching of Pulsed Inductively Coupled Plasmas

  ORAL

  Nov. 8, 2018, 3:45 PM – Nov. 8, 2018, 4:00 PM

  Authors

  • Chenhui Qu

    • University of Michigan

  • Steven Lanham

    • University of Michigan

  • Peng Tian

    • University of Michigan

  • Carl Smith

    • North Carolina State University

  • Kristopher Ford

    • North Carolina State University

  • Joel Brandon

    • North Carolina State University

  • Steven Shannon

    • North Carolina State University

  • Mark J. Kushner

    • University of Michigan
    • Univ. Michigan
    • University of Michigan - Ann Arbor
    • Univ of Michigan - Ann Arbor

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• Predictive Model of E-H Mode Transition Power Level

  ORAL

  Nov. 8, 2018, 4:00 PM – Nov. 8, 2018, 4:15 PM

  Authors

  • Shaun Smith

    • MKS Instruments

  • David Coumou

    • MKS Instruments

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• Numerical study of the influence of faraday shield on RF neutral beam ion sources

  ORAL

  Nov. 8, 2018, 4:15 PM – Nov. 8, 2018, 4:30 PM

  Authors

  • Zhen-Hua Bi

    • School of Physics and Materials Engineering, Dalian Nationalities University

  • Yi Hong

    • School of Physics and Materials Engineering, Dalian Nationalities University

  • Lu Liu

    • School of Physics and Materials Engineering, Dalian Nationalities University

  • Yang Zhang

    • School of Physics and Materials Engineering, Dalian Nationalities University

  • Wen Yan

    • School of Physics and Materials Engineering, Dalian Nationalities University
    • Dalian Nationalities University

  • Ying Song

    • School of Physics and Materials Engineering, Dalian Nationalities University

  • Dongping Liu

    • School of Physics and Materials Engineering, Dalian Nationalities University

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• A global model of a microwave driven inductively coupled small-scale plasma jet

  ORAL

  Nov. 8, 2018, 4:30 PM – Nov. 8, 2018, 4:45 PM

  Authors

  • Michael Klute

    • Ruhr University Bochum, Germany

  • Horia Eugen Porteanu

    • Ferdinand-Braun-Institut, Germany

  • Wolfgang Heinrich

    • Ferdinand-Braun-Institut, Germany

  • Peter Awakowicz

    • Ruhr University Bochum, Germany

  • Ralf Peter Brinkmann

    • Ruhr University Bochum, Germany

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• Floating-wire-assisted remote generation of high-density atmospheric pressure inductively coupled plasma

  ORAL

  Nov. 8, 2018, 4:45 PM – Nov. 8, 2018, 5:00 PM

  Authors

  • Thi-Thuy-Nga Nguyen

    • Institute of Innovation for Future Society, Nagoya University, Japan

  • Minoru Sasaki

    • Toyota Technological Institute, Japan

  • Hidefumi Odaka

    • Asahi Glass Company, Ltd., Japan

  • Takayoshi Tsutsumi

    • Nagoya University, Japan

  • Kenji Ishikawa

    • Nagoya University, Japan

  • Masaru Hori

    • Nagoya University, Japan

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