Capacitively Coupled Plasmas

Presentations

• Electron heating in electronegative capacitively coupled discharge of complex chemistry

  COFFEE_KLATCH · Invited

  Nov. 8, 2018, 2:00 PM – Nov. 8, 2018, 2:30 PM

  Authors

  • Jon Tomas Gudmundsson

    • University of Iceland

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• Spatio-temporal analysis of the electron power absorption in electropositive capacitive RF plasmas based on moments of the Boltzmann equation

  ORAL

  Nov. 8, 2018, 2:30 PM – Nov. 8, 2018, 2:45 PM

  Authors

  • Julian Schulze

    • Ruhr-University Bochum
    • Ruhr University Bochum

  • Zoltan Donko

    • Hungarian Academy of Sciences

  • Trevor Lafleur

    • PlasmaPotential - Physics Consulting and Research

  • Sebastian Wilczek

    • Ruhr-University Bochum

  • Ralf Peter Brinkmann

    • Ruhr-University Bochum

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• Striations in dual-frequency capacitively coupled CF\textunderscore 4 plasmas

  ORAL

  Nov. 8, 2018, 2:45 PM – Nov. 8, 2018, 3:00 PM

  Authors

  • Yong-Xin Liu

    • Dalian University of Technology, China
    • Dalian University of Technology

  • Ihor Korolov

    • Ruhr-University Bochum, Germany

  • Edmund Schungel

    • Evatec AG, Switzerland

  • Zoltan Donko

    • Hungarian Academy of Sciences, Hungary
    • Hungarian Academy of Sciences, Budapest, Hungary
    • Wigner Research Centre for Physics, Budapest, Hungary

  • Julian Schulze

    • Ruhr-University Bochum, Germany
    • Ruhr-University Bochum, Germany, West Virginia University, USA
    • Ruhr University, Bochum, Germany
    • Ruhr University Bochum, Germany

  • You-Nian Wang

    • Dalian University of Technology
    • Dalian University of Technology, China

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• Self-excited plasma series resonance driven by Gaussian type pulses in capacitively coupled plasmas

  ORAL

  Nov. 8, 2018, 3:00 PM – Nov. 8, 2018, 3:15 PM

  Authors

  • Li Wang

    • School of Physics, Dalian University of Technology

  • De-Qi Wen

    • Dalian University of Technology
    • School of Physics, Dalian University of Technology
    • Michigan State University

  • Yuan-Hong Song

    • School of Physics, Dalian University of Technology
    • Dalian University of Technology
    • Dalian University of Technology, China

  • You-Nian Wang

    • School of Physics, Dalian University of Technology

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• Breakdown at chamber wall in ICP/CCP PECVD plasma caused by higher harmonics

  ORAL

  Nov. 8, 2018, 3:15 PM – Nov. 8, 2018, 3:30 PM

  Authors

  • Michael Klick

    • Plasmetrex GmbH

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• Electrical Asymmetric Effect in Very High Frequency Capacitively Coupled Plasma Source using Electromagnetic Plasma Model

  ORAL

  Nov. 8, 2018, 3:30 PM – Nov. 8, 2018, 3:45 PM

  Authors

  • Xiaopu Li

    • Applied Materials Inc

  • Kallol Bera

    • Applied Materials Inc

  • Shahid Rauf

    • Applied Materials Inc

  • Ken Collins

    • Applied Materials Inc

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• Electromagnetic PIC Simulations of VHF CCP discharges having cylindrical geometry

  ORAL

  Nov. 8, 2018, 3:45 PM – Nov. 8, 2018, 4:00 PM

  Authors

  • Denis Eremin

    • Ruhr University Bochum

  • Frederick Schmidt

    • Ruhr University Bochum

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• A method for coupling lumped element circuits to plasma simulations

  ORAL

  Nov. 8, 2018, 4:00 PM – Nov. 8, 2018, 4:15 PM

  Authors

  • Frederik Schmidt

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Tobias Gergs

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Thomas Mussenbrock

    • Electrodynamics and Physical Electronics Group, Brandenburg University of Technology

  • Jan Trieschmann

    • Electrodynamics and Physical Electronics Group, Brandenburg University of Technology

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• Analysis of the power dissipation in a lumped element model for capacitive discharges

  ORAL

  Nov. 8, 2018, 4:15 PM – Nov. 8, 2018, 4:30 PM

  Authors

  • Dennis Engel

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Laura Kroll

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Schabnam Naggary

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Ralf Peter Brinkmann

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum
    • Ruhr-University Bochum

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• Investigation of the electron and the ion kinetics in a capacitively coupled Ar plasma of intermediate pressue regime

  ORAL

  Nov. 8, 2018, 4:30 PM – Nov. 8, 2018, 4:45 PM

  Authors

  • Jin Seok Kim

    • Pusan Natl Univ

  • Ho Jun Kim

    • Dong-A Univ

  • Hae June Lee

    • Pusan Natl Univ
    • Department of Electrical Engineering, Pusan National University, South Korea

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• Dynamics of Multiple Ion Species in Low Pressure Capacitively Coupled Argon-Xenon Discharges

  ORAL

  Nov. 8, 2018, 4:45 PM – Nov. 8, 2018, 5:00 PM

  Authors

  • Maximilian Klich

    • Ruhr University Bochum, Bochum, Germany

  • Sebastian Wilczek

    • Ruhr University Bochum, Bochum, Germany

  • Ralf Peter Brinkmann

    • Ruhr University Bochum, Bochum, Germany

  • Jesper Janssen

    • PlasmaMatters B.V., Eindhoven, Netherlands

  • Thomas Mussenbrock

    • Brandenburg University of Technology, Cottbus, Germany
    • Brandenburg University of Technology Cottbus - Senftenberg, Germany
    • Brandenburg University of Technology Cottbus-Senftenberg

  • Jan Trieschmann

    • Brandenburg University of Technology, Cottbus, Germany

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