Gas Phase Plasma Chemistry

ORAL · KW3 ·





Presentations

  • ORAL

    Authors

    • Rei Sakuma

      • ET Center, Samsung R\&D Institute Japan
    • Satoshi Nakamura

      • ET Center, Samsung R\&D Institute Japan
    • Shogo Sakurai

      • ET Center, Samsung R\&D Institute Japan
    • Hiroyuki Kubotera

      • ET Center, Samsung R\&D Institute Japan
    • Kiyoshi Ishikawa

      • ET Center, Samsung R\&D Institute Japan
    • Sun-Taek Lim

      • Semiconductor R\&D Center, Samsung Electronics
    • Dae Sin Kim

      • Semiconductor R\&D Center, Samsung Electronics

    View abstract →

  • ORAL

    Authors

    • Mikhail Finko

      • Univ. of Illinois Urbana-Champaign
    • Davide Curreli

      • Univ. of Illinois Urbana-Champaign
    • Magdi Azer

      • Illinois Applied Research Institute
    • David Weisz

      • Lawrence Livermore National Laboratory
    • Jonathan Crowhurst

      • Lawrence Livermore National Laboratory
    • Timothy Rose

      • Lawrence Livermore National Laboratory
    • Batikan Koroglu

      • Lawrence Livermore National Laboratory
    • Harry Radousky

      • Lawrence Livermore National Laboratory
    • Joseph Zaug

      • Lawrence Livermore National Laboratory
    • Mike Armstrong

      • Lawrence Livermore National Laboratory

    View abstract →

  • ORAL

    Authors

    • Olivier Guaitella

      • LPP-CNRS, Ecole Polytechnique, Palaiseau, France
      • LPP, Ecole Polytechnique
      • Ecole Polytechnique, France
      • LPP, CNRS, Ecole Polytechnique, UPMC, Universite Paris-Saclay, 91128 Palaiseau, France
    • Ana-Sofia Morillo-Candas

      • LPP, CNRS, Ecole Polytechnique, UPMC, Universite Paris-Saclay, 91128 Palaiseau, France
    • Tiago Silva

      • Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Universidade de Lisboa, 1049-001 Lisboa, Portugal
    • Polina Ogloblina

      • Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Universidade de Lisboa, 1049-001 Lisboa, Portugal
    • Vasco Guerra

      • Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Universidade de Lisboa, 1049-001 Lisboa, Portugal

    View abstract →

  • ORAL

    Authors

    • Katharina Stapelmann

      • North Carolina State Univ
      • North Carolina State University
    • Friederike Kogelheide

      • Ruhr University Bochum
    • Bjoern Offerhaus

      • Ruhr University Bochum
    • Philip Krajinski

      • Ruhr University Bochum
    • Nikita Bibinov

      • Ruhr University Bochum
    • Peter Awakowicz

      • Ruhr University Bochum
    • Julian Schulze

      • Ruhr University Bochum, West Virginia University

    View abstract →

  • ORAL

    Authors

    • Osamu Sakai

      • University of Shiga Prefecture
      • The University of Shiga Prefecture
    • Yasutaka Mizui

      • The University of Shiga Prefecture
    • Tetsuya Kojima

      • The University of Shiga Prefecture
    • Masataka Koshiba

      • The University of Shiga Prefecture
    • Akinori Iwai

      • Kyoto University
    • Shigeyuki Miyagi

      • The University of Shiga Prefecture
    • Tomoyuki Murakami

      • Seikei University

    View abstract →