Comparison of PIC-MCC and fluid simulations for the description of ccrf discharges

We compare the results of Particle-in-Cell simulations with Monte-Carlo collisions (PIC-MCC) with different fluid models for the description of capacitively coupled radio-frequency (ccrf) discharges. Fluid models have the advantage of being computationally much less expensive than PIC-MCC simulations but are potentially less accurate in their predictions for the discharge physics. Compared to the classical fluid model, a novel fluid description with an improved drift-diffusion approximation for the electrons yields results that are in good agreement with the PIC-MCC data~[1]. Here, the applicability range of the fluid models is explored for an extended parameter regime.\\ $[1]$ M. M. Becker, H. K\"ahlert, A. Sun, M. Bonitz, and D. Loffhagen, PSST \textbf{26}, 044001 (2017)