Capacitively Coupled Plasmas

Presentations

• The effects of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in capacitively coupled plasmas

  ORAL

  Nov. 9, 2017, 1:30 PM – Nov. 9, 2017, 1:45 PM

  Authors

  • Julian Schulze

    • Ruhr-University Bochum, Germany
    • AEPT, Ruhr University Bochum

  • Manaswi Daksha

    • Ruhr-University Bochum, Germany

  • Aranka Derzsi

    • Wigner Research Centre for Physics, Hungary

  • Sebastian Wilczek

    • Ruhr-University Bochum, Germany

  • Jan Trieschmann

    • Ruhr-University Bochum, Germany

  • Thomas Mussenbrock

    • Brandenburg University of Technology, Germany

  • Peter Awakowicz

    • Ruhr-University Bochum, Germany

  • Zoltan Donko

    • Wigner Research Centre for Physics, Hungary

  View abstract →

• Nonlinear electromagnetics model of an asymmetrically driven capacitive discharge

  ORAL

  Nov. 9, 2017, 1:45 PM – Nov. 9, 2017, 2:00 PM

  Authors

  • M.A. Lieberman

    • University of California, Berkeley
    • Univ of California - Berkeley

  • Emi Kawamura

    • University of California, Berkeley

  • A.J. Lichtenberg

    • University of California, Berkeley

  • De-Qi Wen

    • Dalian University of Technology, Dalian, China

  View abstract →

• Nonlinear interaction of capacitive discharges and power matching networks

  ORAL

  Nov. 9, 2017, 2:00 PM – Nov. 9, 2017, 2:15 PM

  Authors

  • Frederik Schmidt

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Jan Trieschmann

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Ralf Peter Brinkmann

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Thomas Mussenbrock

    • Electrodynamics and Physical Electronics Group, Brandenburg University of Technology

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• Customizing Capacitively Coupled Plasma Properties with Triple-Frequency Power Sources

  ORAL

  Nov. 9, 2017, 2:15 PM – Nov. 9, 2017, 2:30 PM

  Authors

  • Chenhui Qu

    • University of Michigan

  • Peng Tian

    • University of Michigan

  • Shuo Huang

    • University of Michigan

  • M. J. Kushner

    • University of Michigan
    • Univ of Michigan - Ann Arbor

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• Tailoring charged particle distribution functions and chemical kinetics in non-thermal plasmas using multiple frequency excitation

  COFFEE_KLATCH · Invited

  Nov. 9, 2017, 2:30 PM – Nov. 9, 2017, 3:00 PM

  Authors

  • A. R. Gibson

    • University of York, UK

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• Investigation of Capacitively Coupled Plasma with electron beam by impedance analysis

  ORAL

  Nov. 9, 2017, 3:00 PM – Nov. 9, 2017, 3:15 PM

  Authors

  • Inshik Bae

    • KAIST

  • Hongyoung Chang

    • KAIST

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• Experimental evidence of nonlinear standing wave effect excited by higher harmonics in very high frequency capacitive discharges

  ORAL

  Nov. 9, 2017, 3:15 PM – Nov. 9, 2017, 3:30 PM

  Authors

  • Kai Zhao

    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China

  • Yong-Xin Liu

    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China

  • You-Nian Wang

    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China
    • Dalian University of Technology
    • School of Physics, Dalian University of Technology, Dalian
    • Dalian University of Technology,China

  View abstract →