Magnetically Enhanced Plasmas I
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Presentations
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The role of recycling in pulsed sputtering magnetrons
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Authors
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Jon Tomas Gudmundsson
- University of Iceland, Reykjavik, Iceland and Department of Space and Plasma Physics, KTH-Royal Institute of Technology, Stockholm, Sweden
- University of Iceland, Reykjavik, Iceland and Department of Space and Plasma Physics, KTH--Royal Institute of Technology, Stockholm, Sweden
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Daniel Lundin
- LPGP, UMR 8578 CNRS, Université Paris-Sud, Orsay Cedex, France
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Michael A. Raadu
- Department of Space and Plasma Physics, KTH-Royal Institute of Technology, Stockholm, Sweden
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Nils Brenning
- Department of Space and Plasma Physics, KTH-Royal Institute of Technology, Stockholm, Sweden
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Pressure dependence of Ar$_{\mathrm{2}}^{\mathrm{+}}$, ArTi$^{\mathrm{+}}$, and Ti$_{\mathrm{2}}^{\mathrm{+}}$ dimer formation in a magnetron sputtering discharge.
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Authors
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Martin Cada
- Institute of Physics Czech Academy of Sciences Na Slovance 2 Prague 8, Czech Republic
- Institute of Physics, Academy of Science of the Czech Republic, Na Slovance 2, 18221 Prague 8, Czech Republic
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Rainer Hippler
- Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, Felix-Hausdor-Str. 6, D-17487 Greifswald, Germany
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Vitezslav Stranak
- University of South Bohemia, Faculty of Science, Branisovska 31, 37005 Ceske Budejovice, Czech Republic
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Zdenek Hubicka
- Institute of Physics Czech Academy of Sciences Na Slovance 2 Prague 8, Czech Republic
- Institute of Physics, Academy of Science of the Czech Republic, Na Slovance 2, 18221 Prague 8, Czech Republic
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Christiane Helm
- Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, Felix-Hausdor-Str. 6, D-17487 Greifswald, Germany
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Low-frequency ionization oscillations due to azimuthally rotating spokes in cross-field configurations
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Authors
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Kentaro Hara
- Texas A&M University, College Station, TX
- Texas A\&M University
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Rei Kawashima
- University of Tokyo
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Plasma Diagnostics in Reactive High Power Impulse Magnetron Sputtering System.
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Authors
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Zdenek Hubicka
- Institute of Physics Czech Academy of Sciences Na Slovance 2 Prague 8, Czech Republic
- Institute of Physics, Academy of Science of the Czech Republic, Na Slovance 2, 18221 Prague 8, Czech Republic
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Jiri Olejnicek
- Institute of Physics Czech Academy of Sciences Na Slovance 2 Prague 8, Czech Republic
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Martin Cada
- Institute of Physics Czech Academy of Sciences Na Slovance 2 Prague 8, Czech Republic
- Institute of Physics, Academy of Science of the Czech Republic, Na Slovance 2, 18221 Prague 8, Czech Republic
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Petra Ksirova
- Institute of Physics Czech Academy of Sciences Na Slovance 2 Prague 8
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Stepan Kment
- Palacky University, RCPTM, 17. listopadu 12, 771 46 Olomouc, Czech Republic
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ABSTRACT WITHDRAWN
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Outer Ring-Shaped Magnetized Plasma by RF and HiPIMS Source
ORAL
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Authors
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Hossain Md. Amzad
- Graduate School of Science and Engineering, Saga University
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Yasunori Ohtsu
- Graduate School of Science and Engineering, Saga University
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