Inductively Coupled Plasmas

Presentations

• Theoretical investigation of power balance and hysteresis of a miniature microwave ICP-plasmajet

  ORAL

  Nov. 7, 2017, 1:30 PM – Nov. 7, 2017, 1:45 PM

  Authors

  • Michael Klute

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany

  • Horia-Eugen Porteanu

    • Microwave Department, Ferdinand-Braun-Institut, Germany

  • Wolfgang Heinrich

    • Microwave Department, Ferdinand-Braun-Institut, Germany

  • Peter Awakowicz

    • Electrical Engineering and Plasma Technology, Ruhr University Bochum, Germany

  • Ralf Peter Brinkmann

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany

  View abstract →

• Experimental Investigation of pulsed inductively coupled Ar and Ar/N2 plasmas by a time-resolved Langmuir probe

  ORAL

  Nov. 7, 2017, 1:45 PM – Nov. 7, 2017, 2:00 PM

  Authors

  • Fei Gao

    • Dalian University of Technology,China
    • Dalian University of Technology

  • Yu-Ru Zhang

    • Dalian University of Technology

  • Yong-Xin Liu

    • Dalian University of Technology

  • You-Nian Wang

    • Dalian University of Technology

  View abstract →

• Fundamental Studies of Pulsed Processing Plasmas

  ORAL

  Nov. 7, 2017, 2:00 PM – Nov. 7, 2017, 2:15 PM

  Authors

  • Kristopher Ford

    • North Carolina State University

  • Joel Brandon

    • North Carolina State University

  • Kyung Sun Kim

    • Samsung Electronics Co.

  • Tyler List

    • University of Houston

  • Tianyu Ma

    • University of Houston

  • Priyanka Arora

    • University of Houston

  • Shuo Huang

    • University of Michigan

  • Sang Ki Nam

    • Samsung Electronics Co.

  • Steven Shannon

    • North Carolina State University

  • Vincent Donnelly

    • University of Houston

  • Mark Kushner

    • University of Michigan

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• Model Describing The E-H Mode Transition With Intrinsic Electrical Properties Of Inductively Coupled Plasma Reactors

  ORAL

  Nov. 7, 2017, 2:15 PM – Nov. 7, 2017, 2:30 PM

  Authors

  • Shaun Smith

    • MKS Instruments, Inc.

  • David J. Coumou

    • MKS Instruments, Inc.

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• E-H mode detection and symmetry effects in ICP plasmas with bias power

  ORAL

  Nov. 7, 2017, 2:30 PM – Nov. 7, 2017, 2:45 PM

  Authors

  • Michael Klick

    • Plasmetrex GmbH

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• Effects of electron energy probability function on the negative ion production in low pressure inductively coupled hydrogen plasmas.

  ORAL

  Nov. 7, 2017, 2:45 PM – Nov. 7, 2017, 3:00 PM

  Authors

  • Wei Yang

    • Dalian University of Technology,China and Princeton Plasma Phys Lab

  • Hong Li

    • Dalian University of Technology,China

  • Fei Gao

    • Dalian University of Technology,China
    • Dalian University of Technology

  • Alexander Khrabrov

    • Princeton Plasma Physics Lab
    • Princeton Plasma Phys Lab

  • Igor Kaganovich

    • Princeton Plasma Physics Laboratory, Princeton, NJ
    • Princeton Plasma Physics Lab
    • Princeton Plasma Physics Laboratory
    • Princeton Plasma Phys Lab

  • You-Nian Wang

    • School of Physics and Optoelectronic Technology, Dalian University of Technology, China
    • Dalian University of Technology
    • School of Physics, Dalian University of Technology, Dalian
    • Dalian University of Technology,China

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• Circuit induced pulsed RF transients: impact on plasma parameters and source design considerations

  ORAL

  Nov. 7, 2017, 3:00 PM – Nov. 7, 2017, 3:15 PM

  Authors

  • Joel Brandon

    • North Carolina State University

  • Kris Ford

    • North Carolina State University

  • Sang-Ki Nam

    • Samsung Electronics

  • Jang-Gyoo Yang

    • Samsung Electronics

  • Sangheon Lee

    • Samsung Electronics

  • Steve Shannon

    • North Carolina State University

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• A novel linear microwave plasma source using circular TE$_{\mathrm{11}}$ mode and continuous line slot antenna

  ORAL

  Nov. 7, 2017, 3:15 PM – Nov. 7, 2017, 3:30 PM

  Authors

  • Ju-Hong Cha

    • Department of Electrical Engineering, Pusan National University, Busan, South Korea

  • Ho-Jun Lee

    • Electrical and Computer engineering, Pusan National University
    • Department of Electrical Engineering, Pusan National University, Busan, South Korea

  View abstract →