Linking Theory & Experiment

Presentations

• Modeling of industrial plasma tools and applications: experimental validation

  ORAL

  Nov. 6, 2017, 2:00 PM – Nov. 6, 2017, 2:30 PM

  Authors

  • Shahid Rauf

    • Applied Materials, Inc.

  • Samaneh Sadighi

    • Applied Materials, Inc.

  • Ajit Balakrishna

    • Applied Materials, Inc.

  • Kallol Bera

    • Applied Materials, Inc.

  • Jason Kenney

    • Applied Materials, Inc.

  • Wei Tian

    • Applied Materials, Inc.

  • Jun-Chieh Wang

    • Applied Materials, Inc.

  View abstract →

• Validation of computation by Experiment for the VSim and USim Codes

  ORAL

  Nov. 6, 2017, 2:30 PM – Nov. 6, 2017, 3:00 PM

  Authors

  • John Cary

    • Univ of Colorado - Boulder and Tech-X Corporation

  • SN Averkin

    • Tech-X Corporation

  • KRC Beckwith

    • Tech-X Corporation

  • BM Cowan

    • Tech-X Corporation

  • TG Jenkins

    • Tech-X Corporation

  • SE Kruger

    • Tech-X Corporation

  • M Kundrapu

    • Tech-X Corporation

  • C Roark

    • Tech-X Corporation

  • SW Sides

    • Tech-X Corporation

  • GR Werner

    • Univ of Colorado - Boulder

  View abstract →

• Combining advanced optical diagnostics and simulations to reveal chemical kinetics in atmospheric pressure plasmas

  ORAL

  Nov. 6, 2017, 3:00 PM – Nov. 6, 2017, 3:30 PM

  Authors

  • Sandra Schroeter

    • York Plasma Insitute, University of York
    • University of York

  • J. Bredin

    • University of York

  • A. R. Gibson

    • University of York

  • A. West

    • University of York

  • A. Wijaikhum

    • University of York

  • K. Niemi

    • University of York

  • H. Davies

    • University of York

  • N. Minesi

    • University of York

  • J. Dedrick

    • University of York

  • M. Foucher

    • LPP, Ecole Polytechnique-CNRS

  • J. P. Booth

    • LPP, Ecole Polytechnique-CNRS

  • N. de Oliveira

    • Synchrotron SOLEIL

  • D. Joyeux

    • Synchrotron SOLEIL

  • L. Nahon

    • Synchrotron SOLEIL

  • Y. Gorbanev

    • University of York

  • V. Chechik

    • University of York

  • E. Wagenaars

    • University of York

  • T. Gans

    • University of York

  • D. O'Connell

    • University of York

  View abstract →

• Linking experimental measurements and numerical simulations to understand plasma-surface interaction processes

  ORAL

  Nov. 6, 2017, 3:30 PM – Nov. 6, 2017, 4:00 PM

  Authors

  • A. R. Gibson

    • University of York, UK

  • M. Blake

    • University of York, UK

  • J. Bredin

    • University of York, UK

  • K. Niemi

    • University of York, UK

  • A. Greb

    • University of York, UK

  • B. Bruneau

    • LPICM-CNRS, France

  • E. Johnson

    • LPICM-CNRS, France

  • A. Derzsi

    • Wigner Research Centre, Hungary

  • Z. Donko

    • Wigner Research Centre, Hungary

  • J.-P. Booth

    • LPP-CNRS, France

  • D. O'Connell

    • University of York, UK

  • T. Gans

    • University of York, UK

  View abstract →

• The effects of elementary surface processes on the plasma parameters in capacitively coupled radiofrequency discharges

  ORAL

  Nov. 6, 2017, 4:00 PM – Nov. 6, 2017, 4:30 PM

  Authors

  • Aranka Derzsi

    • West Virginia University

  • Benedek Horvath

    • Wigner RCP

  • Manaswi Daksha

    • West Virginia University

  • Birk Berger

    • Department of Physics, West Virginia University, USA; Insitute for Electrical Engineering, Ruhr-University Bochum, Germany
    • Ruhr-University Bochum

  • Sebastian Wilczek

    • Ruhr-University Bochum

  • Jan Trieschmann

    • Ruhr University, Bochum, Germany
    • Ruhr University Bochum, Germany
    • Ruhr-University Bochum

  • Thomas Mussenbrock

    • Brandenburg University of Technology, Cottbus, Germany
    • Brandenburg University of Technology Cottbus - Senftenberg, Germany
    • Brandenburg University of Technology, Germany

  • Peter Awakowicz

    • Allgemeine Elektro- und Plasmatechnik Ruhr-Universität Bochum
    • Ruhr-University Bochum

  • Zoltan Donko

    • Wigner Research Centre for Physics, Budapest, Hungary
    • Wigner RCP

  • Julian Schulze

    • Ruhr University Bochum, West Virginia University
    • Ruhr University, Bochum, Germany
    • West Virginia University
    • West Virginia University/Bochum University

  View abstract →

• Sputtering process data interpreted by heavy particle simulations

  ORAL

  Nov. 6, 2017, 4:30 PM – Nov. 6, 2017, 5:00 PM

  Authors

  • Jan Trieschmann

    • Ruhr University, Bochum, Germany
    • Ruhr University Bochum, Germany
    • Ruhr-University Bochum

  • Stefan Ries

    • AEPT, Ruhr University Bochum
    • Ruhr University Bochum, Germany

  • Nikita Bibinov

    • Ruhr University Bochum, Germany

  • Peter Awakowicz

    • Institute for Electrical Engineering and Plasma Technology, Ruhr-University Bochum, Germany
    • AEPT, Ruhr University Bochum
    • Ruhr University Bochum, Germany

  • Stanislav Mraz

    • RWTH Aachen University, Germany

  • Jochen M. Schneider

    • RWTH Aachen University, Germany

  • Thomas Mussenbrock

    • Brandenburg University of Technology, Cottbus, Germany
    • Brandenburg University of Technology Cottbus - Senftenberg, Germany
    • Brandenburg University of Technology, Germany

  View abstract →