Linking Academia & Industry

Presentations

• Characterization and diagnostics of RF plasmas under manufacturing conditions

  ORAL

  Nov. 6, 2017, 9:00 AM – Nov. 6, 2017, 9:30 AM

  Authors

  • Michael Klick

    • Plasmetrex GmbH

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• Progress on Voltage Waveform Tailoring for plasmas: From science to process, from lab to fab

  ORAL

  Nov. 6, 2017, 9:30 AM – Nov. 6, 2017, 10:00 AM

  Authors

  • Erik Johnson

    • LPICM-CNRS, Ecole Polytechnique, University Paris-Saclay

  • Sebastien Dine

    • SOLAYL SAS

  • Jean-Paul Booth

    • LPP-CNRS, Ecole Polytechnique, University Paris-Saclay

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• The status of etching processes in semiconductor fabrication, and upcoming challenges.

  ORAL

  Nov. 6, 2017, 10:00 AM – Nov. 6, 2017, 10:30 AM

  Authors

  • Jin-Young Bang

    • Samsung electronics

  • Sungil Cho

    • Samsung electronics

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• Successes, Failures, and Lessons Learned Navigating Industry Supported Research in Academia

  ORAL

  Nov. 6, 2017, 10:30 AM – Nov. 6, 2017, 11:00 AM

  Authors

  • Steven Shannon

    • North Carolina State University
    • Nuclear Engineering Department, North Carolina State University

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• Application Perspective of Plasma Science and Technology for Food and Agriculture

  ORAL

  Nov. 6, 2017, 11:00 AM – Nov. 6, 2017, 11:30 AM

  Authors

  • Wonho Choe

    • Korea Adv Inst of Sci & Tech

  • Cheorun Jo

    • Seoul National University

  • Youbong Lim

    • Plasmapp

  • Suk-Jae Yoo

    • NFRI

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• The application of the multipole resonance probe to industrially relevant processes

  ORAL

  Nov. 6, 2017, 11:30 AM – Nov. 6, 2017, 12:00 PM

  Authors

  • Moritz Oberberg

    • Ruhr-University Bochum

  • Marcel Fiebrandt

    • Ruhr-University Bochum

  • Stefan Ries

    • Ruhr-University Bochum

  • Christian Woelfel

    • Ruhr-University Bochum

  • Peter Awakowicz

    • Ruhr-University Bochum

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