Capacitively Coupled Plasmas III

Presentations

• On the Significance of Metastable States in Low Pressure Capacitively Coupled Oxygen Discharges

  POSTER

  Oct. 14, 2016, 11:00 AM – Oct. 14, 2016, 11:15 AM

  Authors

  • Jon Tomas Gudmundsson

    • University of Iceland
    • University of Iceland, Reykjavik, Iceland

  • Holmfridur Hannesdottir

    • University of Iceland

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• Plasma Instability in Radio-Frequency Capacitively Coupled Discharge

  ORAL

  Oct. 14, 2016, 11:15 AM – Oct. 14, 2016, 11:30 AM

  Authors

  • Kallol Bera

    • Applied Materials, Inc.

  • Ankur Agarwal

    • Applied Materials, Inc.

  • Shahid Rauf

    • Applied Materials, Inc.

  • John Forster

    • Applied Materials, Inc.

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• High bias voltage plasma with electron beam

  ORAL

  Oct. 14, 2016, 11:30 AM – Oct. 14, 2016, 11:45 AM

  Authors

  • Inshik Bae

    • Korea Adv Inst of Sci & Tech

  • Hongyoung Chang

    • Korea Adv Inst of Sci & Tech

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• Voltage vs. Current Driven CCRF Discharges: Differences in Electron and Ion Dynamics

  ORAL

  Oct. 14, 2016, 11:45 AM – Oct. 14, 2016, 12:00 PM

  Authors

  • Sebastian Wilczek

    • Ruhr University Bochum, Bochum, Germany

  • Jan Trieschmann

    • Ruhr University Bochum, Bochum, Germany

  • Julian Schulze

    • Ruhr University Bochum, Bochum, Germany

  • Ralf Peter Brinkmann

    • Ruhr University Bochum, Bochum, Germany

  • Aranka Derzsi

    • Wigner Research Center for Physics, Budapest, Hungary

  • Peter Hartmann

    • Wigner Research Center for Physics, Budapest, Hungary

  • Zoltan Donko

    • Wigner Research Center for Physics, Budapest, Hungary

  • Thomas Mussenbrock

    • Ruhr University Bochum, Bochum, Germany

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• Investigation of plasma-sheath resonances in low pressure discharges

  ORAL

  Oct. 14, 2016, 12:00 PM – Oct. 14, 2016, 12:15 PM

  Authors

  • Schabnam Naggary

    • Ruhr University Bochum

  • Efe Ke­man­eci

    • Ruhr University Bochum

  • Ralf Peter Brinkmann

    • Ruhr University Bochum
    • Institute of Theoretical Electrical Engineering, Ruhr-University Bochum
    • Institute of Theoretical Electrical Engineering, Ruhr-University Bochum,

  • Mustafa Megahed

    • ESI Group

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• Effect of driving frequency on the electron-sheath interaction and electron energy distribution function in a low pressure capacitively coupled plasmas

  ORAL

  Oct. 14, 2016, 12:15 PM – Oct. 14, 2016, 12:30 PM

  Authors

  • Sarveshwar Sharma

    • Institute for Plasma Research, Gandhinagar, Gujarat

  • Nishant Sirse

    • School of Physical Sciences and NCPST, Dublin City University, Dublin 9, Ireland
    • NCPST and School of Physical Sciences, Dublin City Univ
    • Dublin City University

  • Predhiman Kaw

    • Institute for Plasma Research, Gandhinagar, Gujarat

  • Miles Turner

    • School of Physical Sciences and NCPST, Dublin City University, Dublin 9, Ireland
    • Doublin City University
    • Dublin City University

  • Bert Ellingboe

    • School of Physical Sciences and NCPST, Dublin City University, Dublin 9, Ireland
    • Dublin City University
    • NCPST and School of Physical Sciences, Dublin City Univ, Ireland

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