Magnetrons II

Presentations

• Simulation of the electric potential and plasma generation coupling in magnetron sputtering discharges

  ORAL

  Oct. 13, 2016, 4:00 PM – Oct. 13, 2016, 4:15 PM

  Authors

  • Jan Trieschmann

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany

  • Dennis Krueger

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany

  • Frederik Schmidt

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany

  • Ralf Peter Brinkmann

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany
    • Ruhr Universitaet Bochum

  • Thomas Mussenbrock

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany
    • Ruhr University Bochum

  View abstract →

• Global model for active control of capacitive radio frequency magnetron discharges

  ORAL

  Oct. 13, 2016, 4:15 PM – Oct. 13, 2016, 4:30 PM

  Authors

  • Dennis Engel

    • Ruhr University Bochum, Germany

  • Dennis Krueger

    • Ruhr University Bochum, Germany

  • Christian Woelfel

    • Ruhr University Bochum, Germany

  • Moritz Oberberg

    • Ruhr University Bochum, Germany

  • Jan Lunze

    • Ruhr University Bochum, Germany

  • Peter Awakowicz

    • Ruhr University Bochum, Germany

  • Ralf Peter Brinkmann

    • Ruhr University Bochum, Germany

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• Electron dynamics in magnetized technological plasmas: A kinetic description

  ORAL

  Oct. 13, 2016, 4:30 PM – Oct. 13, 2016, 4:45 PM

  Authors

  • Ralf Peter Brinkmann

    • Institute for Theoretical Electrical Engineering, Ruhr-University Bochum

  • Dennis Krueger

    • Institute for Theoretical Electrical Engineering, Ruhr-University Bochum

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• Modeling of RF Magnetron Plasma in N$_{\mathrm{2}}$ with dielectric target

  ORAL

  Oct. 13, 2016, 4:45 PM – Oct. 13, 2016, 5:00 PM

  Authors

  • Steven Arbeltier

    • LPGP UMR 8578 CNRS-Université Paris-Sud, Orsay, France / CEA, LETI, Minatec Campus, 17 rue des Martyrs, Grenoble, France

  • Adrien Revel

    • LPGP UMR 8578 CNRS-Université Paris-Sud, Orsay, France

  • Frédéric Sabary

    • CEA, Le Ripault, France

  • Christophe Secouard

    • CEA, LETI, Minatec Campus, 17 rue des Martyrs, Grenoble, France

  • Tiberiu Minea

    • LPGP UMR 8578 CNRS-Université Paris-Sud, Orsay, France
    • LPGP, Universite Paris-Sud, Orsay, France
    • LPGP UMR 8578, CNRS, Univ. Paris-Sud, Orsay, Fance
    • LPGP, University Paris-Sud, CNRS, University Paris-Saclay, Orsay, France

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• Reactive high power impulse magnetron sputtering: combining simulation and experiment

  ORAL

  Oct. 13, 2016, 5:00 PM – Oct. 13, 2016, 5:15 PM

  Authors

  • Tomas Kozak

    • Department of Physics and NTIS - European Centre of Excellence, University of West Bohemia, Univerzitni 8, 306 14 Plzen, Czech Republic

  • Jaroslav Vlcek

    • Department of Physics and NTIS - European Centre of Excellence, University of West Bohemia, Univerzitni 8, 306 14 Plzen, Czech Republic

  View abstract →