Capacitively Coupled Plasmas II

Presentations

• Experimental and simulation study of capacitively coupled electronegative discharges

  COFFEE_KLATCH · Invited

  Oct. 12, 2016, 8:30 AM – Oct. 12, 2016, 9:00 AM

  Authors

  • Aranka Derzsi

    • Wigner Research Centre for Physics, Budapest, Hungary

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• Plasma Self-organization in Moderately High Pressure Capacitively Coupled RF Discharge.

  ORAL

  Oct. 12, 2016, 9:00 AM – Oct. 12, 2016, 9:15 AM

  Authors

  • Anton Kobelev

    • Applied Materials, Inc., Global Development Center, Russia

  • Kallol Bera

    • Applied Materials, Inc.

  • John Forster

    • Applied Materials, Inc.

  • Alexander Smirnov

    • Applied Materials, Inc., Global Development Center, Russia

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• Comparison of different methods for the measurements and calculations of Capacitively Coupled Plasmas electrical characteristics

  ORAL

  Oct. 12, 2016, 9:15 AM – Oct. 12, 2016, 9:30 AM

  Authors

  • Giannis Tsigaras

    • Plasma Technology Laboratory - Department of Chemical Engineering - University of Patras

  • Nikolaos Spiliopoulos

    • Department of Physics - University of Patras

  • Eleftherios Amanatides

    • Plasma Technology Laboratory - Department of Chemical Engineering - University of Patras

  • Dimitrios Mataras

    • Plasma Technology Laboratory - Department of Chemical Engineering - University of Patras

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• Fluid Modeling of a Very High Frequency Capacitively Coupled Reactor

  ORAL

  Oct. 12, 2016, 9:30 AM – Oct. 12, 2016, 9:45 AM

  Authors

  • Rochan Upadhyay

    • Esgee Technologies Inc.

  • Laxminarayan Raja

    • The University of Texas at Austin
    • University of Texas at Austin
    • University of Texas

  • Peter Ventzek

    • Tokyo Electron America, Austin, Texas 78741, USA
    • Tokyo Electron America

  • Toshihiko Iwao

    • Tokyo Electron Ltd.

  • Kiyotaka Ishibashi

    • Tokyo Electron Ltd.

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• Consistent kinetic simulation of plasma and sputtering in low temperature plasmas

  ORAL

  Oct. 12, 2016, 9:45 AM – Oct. 12, 2016, 10:00 AM

  Authors

  • Frederik Schmidt

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Jan Trieschmann

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Thomas Mussenbrock

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

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