Magnetrons I

Presentations

• First measurements of the temporal evolution of the plasma density in HiPIMS discharges using THz time domain spectroscopy

  ORAL

  Oct. 11, 2016, 4:00 PM – Oct. 11, 2016, 4:15 PM

  Authors

  • Steffen M. Meier

    • Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany

  • Ante Hecimovic

    • Institute for Application-Oriented Plasma Physics, Ruhr-University Bochum, Germany

  • Tsanko V. Tsankov

    • Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany

  • Dirk Luggen\-h\"olscher

    • Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany

  • Uwe Czarnetzki

    • Institute for Plasma and Atomic Physics, Ruhr-University Bochum, Germany

  View abstract →

• An ionization region model of the reactive Ar/O$_2$ high power impulse magnetron sputtering discharge

  ORAL

  Oct. 11, 2016, 4:15 PM – Oct. 11, 2016, 4:30 PM

  Authors

  • Jon Tomas Gudmundsson

    • University of Iceland
    • University of Iceland, Reykjavik, Iceland

  • Daniel Lundin

    • LPGP, Universite Paris-Sud, Orsay, France

  • Nils Brenning

    • KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden

  • Michel A. Raadu

    • KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden

  • Chunqing Huo

    • KTH-Royal Institute of Technology, SE-100 44, Stockholm, Sweden

  • Tiberiu Minea

    • LPGP UMR 8578 CNRS-Université Paris-Sud, Orsay, France
    • LPGP, Universite Paris-Sud, Orsay, France
    • LPGP UMR 8578, CNRS, Univ. Paris-Sud, Orsay, Fance
    • LPGP, University Paris-Sud, CNRS, University Paris-Saclay, Orsay, France

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• Standing helicon induced by a rapidly bent magnetic field in plasmas

  ORAL

  Oct. 11, 2016, 4:30 PM – Oct. 11, 2016, 4:45 PM

  Authors

  • Kazunori Takahashi

    • Tohoku University
    • Tohoku Univ

  • Sho Takayama

    • Tohoku Univ

  • Atsushi Komuro

    • Department of electrical engineering, Tohoku University
    • Tohoku Univ

  • Akira Ando

    • Tohoku Univ

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• Anomalous cross-B field transport and spokes in HiPIMS plasma

  ORAL

  Oct. 11, 2016, 4:45 PM – Oct. 11, 2016, 5:00 PM

  Authors

  • Ante Hecimovic

    • Ruhr-Universität Bochum
    • Ruhr-University Bochum
    • Ruhr University Bochum

  • Christian Maszl

    • Ruhr University Bochum

  • Volker Schulz-von der Gathen

    • Ruhr University Bochum

  • Achim von Keudell

    • Ruhr University Bochum

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• The self scattering regime of reactive high power impulse magnetron sputtering of chromium and nitrogen

  ORAL

  Oct. 11, 2016, 5:00 PM – Oct. 11, 2016, 5:15 PM

  Authors

  • Wolfgang Breilmann

    • Ruhr-University Bochum

  • Christian Maszl

    • Ruhr-University Bochum
    • Institute of Experimental Physics II, Ruhr-University Bochum

  • Ante Hecimovic

    • Ruhr-Universität Bochum
    • Ruhr-University Bochum
    • Ruhr University Bochum

  • Jan Benedikt

    • Ruhr-University Bochum

  • Achim von Keudell

    • Ruhr-Universität Bochum
    • Ruhr-University Bochum

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• Scattering of magnetized electrons at the boundary of low temperature plasmas

  ORAL

  Oct. 11, 2016, 5:15 PM – Oct. 11, 2016, 5:30 PM

  Authors

  • Dennis Krueger

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany

  • Jan Trieschmann

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany

  • Ralf Peter Brinkmann

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany

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