Optical Emission Spectroscopy

Presentations

• UV/VUV photon fluxes from cylindrical ICPs at 1 MHz in hydrogen.

  ORAL

  Oct. 11, 2016, 2:00 PM – Oct. 11, 2016, 2:15 PM

  Authors

  • Ursel Fantz

    • Max-Planck-Institut fuer Plasmaphysik

  • David Rauner

    • Max-Planck-Institut fuer Plasmaphysik

  • Stefan Briefi

    • AG Experimentelle Plasmaphysik, Universitaet Augsburg, 86135 Augsburg
    • Universität Augsburg

  • Dirk Wuenderlich

    • Max-Planck-Institut fuer Plasmaphysik

  View abstract →

• Extreme ultraviolet spectroscopy of low pressure helium microwave driven discharges

  ORAL

  Oct. 11, 2016, 2:15 PM – Oct. 11, 2016, 2:30 PM

  Authors

  • Susana Espinho

    • Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Universidade de Lisboa, Portugal

  • Edgar Felizardo

    • Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Universidade de Lisboa, Portugal

  • Elena Tatarova

    • Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Universidade de Lisboa, Portugal

  • Luis Lemos Alves

    • Instituto de Plasmas e Fusao Nuclear, Instituto Superior Tecnico, Universidade de Lisboa, Portugal

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• A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in technological rf plasmas

  ORAL

  Oct. 11, 2016, 2:30 PM – Oct. 11, 2016, 2:45 PM

  Authors

  • Birk Berger

    • Department of Physics, West Virginia University, Morgantown, USA; Institute for Electrical Engineering, Ruhr-University Bochum, Germany
    • Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum

  • Julian Schulze

    • Department of Physics, West Virginia University; Institute for Electrical Engineering, Ruhr-University Bochum

  • Manaswi Daksha

    • Department of Physics, West Virginia University

  • Edmund Schuengel

    • Department of Physics, West Virginia University

  • Mark Koepke

    • Department of Physics, West Virginia University

  • Ihor Korolov

    • Hungarian Academy of Sciences

  • Aranka Derzsi

    • Hungarian Academy of Sciences

  • Zoltan Donko

    • Hungarian Academy of Sciences

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• Actinometry of O, N and F atoms

  ORAL

  Oct. 11, 2016, 2:45 PM – Oct. 11, 2016, 3:00 PM

  Authors

  • Andrey Volynets

    • Dept of Physics, Lomonosov Moscow State Univ, Russian Federation

  • Dmitry Lopaev

    • Skobeltsyn Institute of Nuclear Physics, Moscow State University, SINP MSU, Moscow Russia
    • Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State Univ, Russia

  • Alexey Zotovich

    • Dept of Physics, Lomonosov Moscow State Univ., Russian Federation

  • Sergey Zyryanov

    • Faculty of Physics, Moscow State University, MSU, Moscow Russia
    • Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State Univ. Russia

  • Alexander Rakhimov

    • Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State Univ, Russia

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• Challenges in Optical Emission Spectroscopy

  ORAL

  Oct. 11, 2016, 3:00 PM – Oct. 11, 2016, 3:15 PM

  Authors

  • Sarah Siepa

    • FeP/TEF14, Robert Bosch GmbH, Germany

  • Birk Berger

    • Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany

  • Julian Schulze

    • Department of Physics, West Virginia University, USA, Institute for Electrical Engineering, Ruhr-University Bochum, Germany

  • Edmund Schuengel

    • Department of Physics, West Virginia University, USA

  • Achim von Keudell

    • Institute for Experimental Physics II, Ruhr-University Bochum, Germany

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• Plasma monitoring of nanoparticles formation in SiH4/H2 discharges

  ORAL

  Oct. 11, 2016, 3:15 PM – Oct. 11, 2016, 3:30 PM

  Authors

  • Giannis Alexiou

    • Plasma Technology Laboratory - Department of Chemical Engineering - University of Patras

  • Giannis Tsigaras

    • Plasma Technology Laboratory - Department of Chemical Engineering - University of Patras

  • Eleftherios Amanatides

    • Plasma Technology Laboratory - Department of Chemical Engineering - University of Patras

  • Dimitrios Mataras

    • Plasma Technology Laboratory - Department of Chemical Engineering - University of Patras

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