Electrical Diagnostics I

Presentations

• RF inductive probe to measure plasma complex conductivity

  COFFEE_KLATCH · Invited

  Oct. 11, 2016, 8:30 AM – Oct. 11, 2016, 9:00 AM

  Authors

  • Alan Howling

    • Swiss Plasma Center
    • EPFL, Swiss Plasma Center, CH-1015 Lausanne, Switzerland

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• Active Plasma Resonance Spectroscopy: Evaluation of a fluiddynamic-model of the planar multipole resonance probe using functional analytic methods

  ORAL

  Oct. 11, 2016, 9:00 AM – Oct. 11, 2016, 9:15 AM

  Authors

  • Michael Friedrichs

    • Institute of Product and Process Innovation, Leuphana University Lüneburg

  • Ralf Peter Brinkmann

    • Ruhr University Bochum
    • Institute of Theoretical Electrical Engineering, Ruhr-University Bochum
    • Institute of Theoretical Electrical Engineering, Ruhr-University Bochum,

  • Jens Oberrath

    • Institute of Product and Process Innovation, Leuphana University Lueneburg, Germany
    • Institute of Product and Process Innovation, Leuphana University Lüneburg

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• Collisionless Spectral Kinetic Simulation of Ideal Multipole Resonance Probe

  ORAL

  Oct. 11, 2016, 9:15 AM – Oct. 11, 2016, 9:30 AM

  Authors

  • Junbo Gong

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Sebastian Wilczek

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Daniel Szeremley

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Jens Oberrath

    • Institute of Product and Process Innovation, Leuphana University Lüneburg

  • Denis Eremin

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Wladislaw Dobrygin

    • Functional Materials and Coating Technologies, Robert Bosch GmbH

  • Christian Schilling

    • Institute of Microwave System, Ruhr University Bochum

  • Michael Friedrichs

    • Institute of Product and Process Innovation, Leuphana University Lüneburg

  • Ralf Peter Brinkmann

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

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• Electron density measurements in very electronegative plasmas using different diagnostic techniques: theory and experiments

  ORAL

  Oct. 11, 2016, 9:30 AM – Oct. 11, 2016, 9:45 AM

  Authors

  • Dmytro Rafalskyi

    • Laboratoire de Physique des Plasmas, Ecole Polytechnique, Palaiseau FRANCE

  • Trevor Lafleur

    • LPP Ecole Polytechnique, and Centre National d'Etudes Spatiale (CNES)
    • Ecole Polytechnique
    • CNES, Ecole Polytechnique

  • Ane Aanesland

    • CNRS, Laboratoire de Physique des Plasmas, Ecole Polytechnique, Palaiseau FRANCE
    • CNRS, Ecole Polytechnique

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• Measurement Of Plasma Parameters In Micro-Discharge By Wall Probe

  ORAL

  Oct. 11, 2016, 9:45 AM – Oct. 11, 2016, 10:00 AM

  Authors

  • Almaz Saifutdinov

    • Saint-Petersburg State University

  • Anatoly Kudryavtsev

    • St. Petersburg State University
    • Saint Petersburg State University, St.Petersburg, Russia
    • Saint-Petersburg State University

  • Sergey Sysoev

    • Saint-Petersburg State University

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• Combined complementary plasma diagnostics to characterize a 2f plasma with additional DC current with conditioning effects at the chamber wall

  ORAL

  Oct. 11, 2016, 10:00 AM – Oct. 11, 2016, 10:15 AM

  Authors

  • Michael Klick

    • Plasmetrex GmbH

  • Ralf Rothe

    • Plasmetrex GmbH

  • Kye Hyun Baek

    • Semiconductor R&D Center, Samsung Electronics Co.

  • Eunwoo Lee

    • Semiconductor R&D Center, Samsung Electronics Co.

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• MOVED TO DT1:6

  Oct. 11, 2016, 10:15 AM – Oct. 11, 2016, 10:30 AM

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