Pulsed High Power Plasmas for Synthesis of Nanostructured Thin Films
FOCUS · AM3 ·
Presentations
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High Power Impulse Magnetron Sputtering - the Age of Adolescence
Invited
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Authors
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Arutiun Ehiasarian
- Sheffield Hallam University
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Lessons from modelling DC reactive magnetron sputtering for HIPIMS users
Invited
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Authors
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Diederik Depla
- Ghent University
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Lunch Break
COFFEE_KLATCH
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Synchronized metal-ion irradiation as a way to control growth of transition-metal nitride alloy films during hybrid HIPIMS/DCMS co-sputtering
COFFEE_KLATCH · Invited
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Authors
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Grzegorz Greczynski
- Link\"oping University
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Control of nanoscale atomic arrangement in multicomponent thin films by temporally modulated vapour fluxes
COFFEE_KLATCH · Invited
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Authors
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Kostas Sarakinos
- Linköping University
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Coffee Break
COFFEE_KLATCH
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What can we learn about HiPIMS process from the multidimensional plasma modeling?
COFFEE_KLATCH · Invited
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Authors
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Tiberiu Minea
- LPGP UMR 8578 CNRS-Université Paris-Sud, Orsay, France
- LPGP, Universite Paris-Sud, Orsay, France
- LPGP UMR 8578, CNRS, Univ. Paris-Sud, Orsay, Fance
- LPGP, University Paris-Sud, CNRS, University Paris-Saclay, Orsay, France
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Localized traveling ionization zones and their importance for the high power impulse magnetron sputtering process
COFFEE_KLATCH · Invited
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Authors
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Christian Maszl
- Ruhr-University Bochum
- Institute of Experimental Physics II, Ruhr-University Bochum
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Visualizing the ground state particle dynamics in HiPIMS discharges
COFFEE_KLATCH · Invited
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Authors
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Nikolay Britun
- University of Mons
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Closing Remarks
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