Magnetron Sputter Deposition

Presentations

• Self-Assembled Multi-Layer a-C:H/Me Coatings by Reactive Sputter Deposition

  COFFEE_KLATCH · Invited

  Oct. 16, 2015, 3:30 PM – Oct. 16, 2015, 4:00 PM

  Authors

  • Jyh-Ming Ting

    • Department of Materials Science and Engineering, National Cheng Kung University, Taiwan
    • National Cheng Kung University

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• Applying Composition Control to Enhance the Mechanical and Thermal Properties of Zr-Cu-Ni-Al-N Thin Film Metallic Glass

  ORAL

  Oct. 16, 2015, 4:00 PM – Oct. 16, 2015, 4:15 PM

  Authors

  • Joseph Lee

    • National Tsing-Hua University

  • Jenq-Gong Duh

    • National Tsing-Hua University

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• Fabrication of spin valve junctions based on Fe/Fe$_{3}$Si/FeSi$_{2}$/Fe$_{3}$Si quadrilayered films by facing targets direct-current sputtering

  ORAL

  Oct. 16, 2015, 4:15 PM – Oct. 16, 2015, 4:30 PM

  Authors

  • Kazuya Ishibashi

    • Department of Applied Science for Electronics and Materials, Kyushu University

  • Kazutoshi Nakashima

    • Department of Applied Science for Electronics and Materials, Kyushu University

  • Ken-ichiro Sakai

    • Department of Control and Information Systems Engineering, Kurume National College of Technology

  • Tsuyoshi Yoshitake

    • Department of Applied Science for Electronics and Materials, Kyushu University
    • Department of Applied Sciences for Electronics and Materials, Kyushu University

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• Surface Roughness Control of DC Sputter Film Deposition by Superposition of VHF Power

  ORAL

  Oct. 16, 2015, 4:30 PM – Oct. 16, 2015, 4:45 PM

  Authors

  • Fukui Takashi

    • Nagoya University

  • Suyama Taku

    • Nagoya University

  • Fukuoka Yushi

    • Nagoya University

  • Sasai Kensuke

    • Nagoya University

  • Toyoda Hirotaka

    • Nagoya University, PLANT, Nagoya University

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• Study of the mechanical properties and the microstructure of magnetron sputtered MoBC coatings

  ORAL

  Oct. 16, 2015, 4:45 PM – Oct. 16, 2015, 5:00 PM

  Authors

  • Vilma Bursikova

    • Department of Physical Electronics, Faculty of Science, Masaryk University

  • Pavel Soucek

    • Department of Physical Electronics, Faculty of Science, Masaryk University

  • Petr Vasina

    • Department of Physical Electronics, Faculty of Science, Masaryk University

  • Lukas Zabransky

    • Department of Physical Electronics, Faculty of Science, Masaryk University

  • Jiri Bursik

    • Institute of Physics of Materials, Academy of Sciences of the Czech Republic

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• Scalable Plasma Engineering For Transparent-Conductive Performance Improvment in Al-Doped ZnO Thin Films

  ORAL

  Oct. 16, 2015, 5:00 PM – Oct. 16, 2015, 5:15 PM

  Authors

  • Manish Kumar

    • Sungkyunkwan University

  • Long Wen

    • Sungkyunkwan University

  • Jeon Han

    • Sungkyunkwan University

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