Capacitively Coupled Plasmas II

Presentations

• The role of the singlet metastables in capacitively coupled oxygen discharges

  ORAL

  Oct. 15, 2015, 1:30 PM – Oct. 15, 2015, 1:45 PM

  Authors

  • Jon Gudmundsson

    • University of Iceland
    • University of Iceland, Reykjavik IS-107, Iceland and KTH Royal Institute of Technology, Stockholm SE-100 44, Sweden

  • M.A. Lieberman

    • University of California at Berkeley
    • University of California, Berkeley
    • Univ of California - Berkeley

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• Experimental observation of multi-layer excitation structure in capacitively coupled SF6 plasmas

  ORAL

  Oct. 15, 2015, 1:45 PM – Oct. 15, 2015, 2:00 PM

  Authors

  • Yong-Xin Liu

    • Dalian University of Technology

  • Fei Gao

    • Dalian University of Technology

  • Song Yuan-Hong

    • Dalian University of Technology
    • Dalin University of Technology

  • Xue-Chun Li

    • Dalian University of Technology

  • Wang You-Nian

    • Dalian University of Technology
    • School of Physics and Optoelectronic Engineering, Dalian University of Technology
    • Dalin University of Technology

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• ABSTRACT WITHDRAWN

  Oct. 15, 2015, 2:00 PM – Oct. 15, 2015, 2:15 PM

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• Harmonic generation of microwave frequencies in plasmas

  ORAL

  Oct. 15, 2015, 2:15 PM – Oct. 15, 2015, 2:30 PM

  Authors

  • Premkumar PanneerChelvam

    • The University of Texas at Austin

  • Laxminarayan L. Raja

    • The University of Texas at Austin

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• Generation of anomalously energetic suprathermal electrons by an electron beam interacting with a nonuniform plasma

  ORAL

  Oct. 15, 2015, 2:30 PM – Oct. 15, 2015, 2:45 PM

  Authors

  • Dmytro Sydorenko

    • University of Alberta, Canada

  • Igor D. Kaganovich

    • Princeton University

  • Peter L. Ventzek

    • Tokyo Electron America

  • Lee Chen

    • Tokyo Electron America

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